Nanostructuring of silicon by laser direct writing

Matthias Mullenborn, Antti-Pekka Jauho (Editor)

Research output: Chapter in Book/Report/Conference proceeding › Book chapter › Research › peer-review

Original language	English
Title of host publication	Nanostructuring of silicon by laser direct writing
Publisher	Kluwer Academic
Publication date	1996
Pages	85-104
Publication status	Published - 1996
Event	Frontiers in Nano-scale Science of Micron/Submicron Devices. NATO-ASI Series E: Applied Science - Duration: 5 Nov 1829 → …

Conference	Frontiers in Nano-scale Science of Micron/Submicron Devices. NATO-ASI Series E: Applied Science
Period	05/11/1829 → …

OpenUrl availability

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title = "Nanostructuring of silicon by laser direct writing",

author = "Matthias Mullenborn and Antti-Pekka Jauho",

year = "1996",

language = "English",

pages = "85--104",

booktitle = "Nanostructuring of silicon by laser direct writing",

publisher = "Kluwer Academic",

note = "Frontiers in Nano-scale Science of Micron/Submicron Devices. NATO-ASI Series E: Applied Science ; Conference date: 05-11-1829",

}

TY - CHAP

T1 - Nanostructuring of silicon by laser direct writing

AU - Mullenborn, Matthias

A2 - Jauho, Antti-Pekka

PY - 1996

Y1 - 1996

M3 - Book chapter

SP - 85

EP - 104

BT - Nanostructuring of silicon by laser direct writing

PB - Kluwer Academic

T2 - Frontiers in Nano-scale Science of Micron/Submicron Devices. NATO-ASI Series E: Applied Science

Y2 - 5 November 1829

ER -