Nanostructuring of silicon by laser direct writing

Matthias Mullenborn, Antti-Pekka Jauho (Editor)

    Research output: Chapter in Book/Report/Conference proceedingBook chapterResearchpeer-review

    Original languageEnglish
    Title of host publicationNanostructuring of silicon by laser direct writing
    PublisherKluwer Academic
    Publication date1996
    Pages85-104
    Publication statusPublished - 1996
    EventFrontiers in Nano-scale Science of Micron/Submicron Devices. NATO-ASI Series E: Applied Science -
    Duration: 5 Nov 1829 → …

    Conference

    ConferenceFrontiers in Nano-scale Science of Micron/Submicron Devices. NATO-ASI Series E: Applied Science
    Period05/11/1829 → …

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