Original language | English |
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Title of host publication | Nanostructuring of silicon by laser direct writing |
Publisher | Kluwer Academic |
Publication date | 1996 |
Pages | 85-104 |
Publication status | Published - 1996 |
Event | Frontiers in Nano-scale Science of Micron/Submicron
Devices. NATO-ASI Series E: Applied Science - Duration: 5 Nov 1829 → … |
Conference
Conference | Frontiers in Nano-scale Science of Micron/Submicron Devices. NATO-ASI Series E: Applied Science |
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Period | 05/11/1829 → … |