Abstract
We present a process for fabricating nanostructured surfaces with feature sizes down to at least 50 nm and aspect ratios of 1:1 by injection molding. We explored the effects of mold coatings and injection molding conditions on the final nanostructure quality. A plasma-polymerized fluorocarbon based antistiction coating was found to improve the replication fidelity (shape and depth) of nanoscale features substantially. Arrays of holes of 50 nm diameter/35 nm depth and 100 nm/100 nm diameter, respectively, were mass-produced in cyclic olefin copolymer (Topas 5013) by injection molding. Polymer microfluidic channel chip parts resulted from a separate injection molding process. The microfluidic chip part and the nanostructured chip part were successfully bonded to form a sealed microfluidic system using air plasma assisted thermal bonding.
Original language | English |
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Journal | Microelectronic Engineering |
Volume | 87 |
Issue number | 5-8 |
Pages (from-to) | 1379-1382 |
ISSN | 0167-9317 |
DOIs | |
Publication status | Published - 2010 |
Keywords
- Topas
- Polymer
- Electron beam lithography
- Electroforming
- Injection molding
- Nickel mold
- Cyclic olefin copolymer
- Nanostructures