Nanostructures for all-polymer microfluidic systems

    Research output: Contribution to journalJournal articleResearchpeer-review

    Abstract

    We present a process for fabricating nanostructured surfaces with feature sizes down to at least 50 nm and aspect ratios of 1:1 by injection molding. We explored the effects of mold coatings and injection molding conditions on the final nanostructure quality. A plasma-polymerized fluorocarbon based antistiction coating was found to improve the replication fidelity (shape and depth) of nanoscale features substantially. Arrays of holes of 50 nm diameter/35 nm depth and 100 nm/100 nm diameter, respectively, were mass-produced in cyclic olefin copolymer (Topas 5013) by injection molding. Polymer microfluidic channel chip parts resulted from a separate injection molding process. The microfluidic chip part and the nanostructured chip part were successfully bonded to form a sealed microfluidic system using air plasma assisted thermal bonding.
    Original languageEnglish
    JournalMicroelectronic Engineering
    Volume87
    Issue number5-8
    Pages (from-to)1379-1382
    ISSN0167-9317
    DOIs
    Publication statusPublished - 2010

    Keywords

    • Topas
    • Polymer
    • Electron beam lithography
    • Electroforming
    • Injection molding
    • Nickel mold
    • Cyclic olefin copolymer
    • Nanostructures

    Cite this

    @article{e69a270d07de43f4800fd4e82abcc0ea,
    title = "Nanostructures for all-polymer microfluidic systems",
    abstract = "We present a process for fabricating nanostructured surfaces with feature sizes down to at least 50 nm and aspect ratios of 1:1 by injection molding. We explored the effects of mold coatings and injection molding conditions on the final nanostructure quality. A plasma-polymerized fluorocarbon based antistiction coating was found to improve the replication fidelity (shape and depth) of nanoscale features substantially. Arrays of holes of 50 nm diameter/35 nm depth and 100 nm/100 nm diameter, respectively, were mass-produced in cyclic olefin copolymer (Topas 5013) by injection molding. Polymer microfluidic channel chip parts resulted from a separate injection molding process. The microfluidic chip part and the nanostructured chip part were successfully bonded to form a sealed microfluidic system using air plasma assisted thermal bonding.",
    keywords = "Topas, Polymer, Electron beam lithography, Electroforming, Injection molding, Nickel mold, Cyclic olefin copolymer, Nanostructures",
    author = "Maria Matschuk and Henrik Bruus and Larsen, {Niels Bent}",
    year = "2010",
    doi = "10.1016/j.mee.2009.11.167",
    language = "English",
    volume = "87",
    pages = "1379--1382",
    journal = "Microelectronic Engineering",
    issn = "0167-9317",
    publisher = "Elsevier",
    number = "5-8",

    }

    Nanostructures for all-polymer microfluidic systems. / Matschuk, Maria; Bruus, Henrik; Larsen, Niels Bent.

    In: Microelectronic Engineering, Vol. 87, No. 5-8, 2010, p. 1379-1382.

    Research output: Contribution to journalJournal articleResearchpeer-review

    TY - JOUR

    T1 - Nanostructures for all-polymer microfluidic systems

    AU - Matschuk, Maria

    AU - Bruus, Henrik

    AU - Larsen, Niels Bent

    PY - 2010

    Y1 - 2010

    N2 - We present a process for fabricating nanostructured surfaces with feature sizes down to at least 50 nm and aspect ratios of 1:1 by injection molding. We explored the effects of mold coatings and injection molding conditions on the final nanostructure quality. A plasma-polymerized fluorocarbon based antistiction coating was found to improve the replication fidelity (shape and depth) of nanoscale features substantially. Arrays of holes of 50 nm diameter/35 nm depth and 100 nm/100 nm diameter, respectively, were mass-produced in cyclic olefin copolymer (Topas 5013) by injection molding. Polymer microfluidic channel chip parts resulted from a separate injection molding process. The microfluidic chip part and the nanostructured chip part were successfully bonded to form a sealed microfluidic system using air plasma assisted thermal bonding.

    AB - We present a process for fabricating nanostructured surfaces with feature sizes down to at least 50 nm and aspect ratios of 1:1 by injection molding. We explored the effects of mold coatings and injection molding conditions on the final nanostructure quality. A plasma-polymerized fluorocarbon based antistiction coating was found to improve the replication fidelity (shape and depth) of nanoscale features substantially. Arrays of holes of 50 nm diameter/35 nm depth and 100 nm/100 nm diameter, respectively, were mass-produced in cyclic olefin copolymer (Topas 5013) by injection molding. Polymer microfluidic channel chip parts resulted from a separate injection molding process. The microfluidic chip part and the nanostructured chip part were successfully bonded to form a sealed microfluidic system using air plasma assisted thermal bonding.

    KW - Topas

    KW - Polymer

    KW - Electron beam lithography

    KW - Electroforming

    KW - Injection molding

    KW - Nickel mold

    KW - Cyclic olefin copolymer

    KW - Nanostructures

    U2 - 10.1016/j.mee.2009.11.167

    DO - 10.1016/j.mee.2009.11.167

    M3 - Journal article

    VL - 87

    SP - 1379

    EP - 1382

    JO - Microelectronic Engineering

    JF - Microelectronic Engineering

    SN - 0167-9317

    IS - 5-8

    ER -