Nanostructures for all-polymer microfluidic systems

    Research output: Contribution to journalJournal articleResearchpeer-review


    We present a process for fabricating nanostructured surfaces with feature sizes down to at least 50 nm and aspect ratios of 1:1 by injection molding. We explored the effects of mold coatings and injection molding conditions on the final nanostructure quality. A plasma-polymerized fluorocarbon based antistiction coating was found to improve the replication fidelity (shape and depth) of nanoscale features substantially. Arrays of holes of 50 nm diameter/35 nm depth and 100 nm/100 nm diameter, respectively, were mass-produced in cyclic olefin copolymer (Topas 5013) by injection molding. Polymer microfluidic channel chip parts resulted from a separate injection molding process. The microfluidic chip part and the nanostructured chip part were successfully bonded to form a sealed microfluidic system using air plasma assisted thermal bonding.
    Original languageEnglish
    JournalMicroelectronic Engineering
    Issue number5-8
    Pages (from-to)1379-1382
    Publication statusPublished - 2010


    • Topas
    • Polymer
    • Electron beam lithography
    • Electroforming
    • Injection molding
    • Nickel mold
    • Cyclic olefin copolymer
    • Nanostructures


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