The change in the surface potential of TiO2 coatings upon UV-illumination was investigated on the nanoscale using Scanning Kelvin Probe Force microscopy and on the micro-scale using photo-electrochemical measurements. A good correlation between the two techniques was obtained. The changes in the surface potential of TiO2 coatings upon UV-illumination are closely correlated to the band gap and thickness of the coatings. The inhomogeneity surface potential distribution of a 100 nm TiO2 film indicates a heterogeneous coating. Transition to a homogeneous surface potential distribution was observed with increasing thickness of the TiO2 coating.