Nanoscale structures by laser direct writing in silicon

Paul Andreas Holger Dirac, Matthias Mullenborn, Jon Wulff Petersen

    Research output: Contribution to journalJournal articleResearchpeer-review

    Original languageEnglish
    JournalMaterials Research Society Symposium Proceedings
    Volume380
    Pages (from-to)43-49
    ISSN0272-9172
    Publication statusPublished - 1996

    Cite this

    Dirac, P. A. H., Mullenborn, M., & Petersen, J. W. (1996). Nanoscale structures by laser direct writing in silicon. Materials Research Society Symposium Proceedings, 380, 43-49.