Nanoscale structures by laser direct writing in silicon

Paul Andreas Holger Dirac, Matthias Mullenborn, Jon Wulff Petersen

Research output: Contribution to journal › Journal article › Research › peer-review

Original language	English
Journal	Materials Research Society Symposium Proceedings
Volume	380
Pages (from-to)	43-49
ISSN	0272-9172
Publication status	Published - 1996

OpenUrl availability

@article{8c355a5b848f4fa38221c245b3cd0a29,

title = "Nanoscale structures by laser direct writing in silicon",

author = "Dirac, {Paul Andreas Holger} and Matthias Mullenborn and Petersen, {Jon Wulff}",

year = "1996",

language = "English",

volume = "380",

pages = "43--49",

journal = "Materials Research Society Symposium Proceedings",

issn = "0272-9172",

publisher = "Materials Research Society",

}