Nanopatterning by AFM nano-oxidation of thin aluminum layers as a tool for the prototyping of nanoelectromechanical systems

C. Martin, Zachary James Davis, Esko Sebastian Forsén, Mingdong Dong, J. Montserrat, G. Abadal, F. Perez-Murano, X. Borrise, Anja Boisen

    Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

    Original languageEnglish
    Title of host publicationProceedings of the international Society for Optical Engineering (SPIE) 118
    Publication date2003
    Pages189-196
    Publication statusPublished - 2003

    Cite this

    Martin, C., Davis, Z. J., Forsén, E. S., Dong, M., Montserrat, J., Abadal, G., Perez-Murano, F., Borrise, X., & Boisen, A. (2003). Nanopatterning by AFM nano-oxidation of thin aluminum layers as a tool for the prototyping of nanoelectromechanical systems. In Proceedings of the international Society for Optical Engineering (SPIE) 118 (pp. 189-196)