Nanopatterning by AFM nano-oxidation of thin aluminum layers as a tool for the prototyping of nanoelectromechanical systems

C. Martin, Zachary James Davis, Esko Sebastian Forsén, Mingdong Dong, J. Montserrat, G. Abadal, F. Perez-Murano, X. Borrise, Anja Boisen

    Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

    Original languageEnglish
    Title of host publicationProceedings of the international Society for Optical Engineering (SPIE) 118
    Publication date2003
    Publication statusPublished - 2003

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