Nanopatterning by AFM nano-oxidation of thin aluminum layers as a tool for the prototyping of nanoelectromechanical systems

F. Pérez-Murano, Zachary James Davis, Esko Sebastian Forsén, Mingdong Dong, J. Montserrat, G. Abadal, X. Borrisé, Ole Hansen, Anja Boisen, N. Barniol

    Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

    Original languageEnglish
    Title of host publicationProceedings of Micro- and nanoengineering (MNE)
    Publication date2002
    Publication statusPublished - 2002

    Cite this