Nanometrology using localized surface plasmon resonance spectroscopy

Claus Jeppesen; Daniel N. Lindstedt; Asger V. Laurberg; Anders Kristensen; N. Asger Mortensen

doi:10.1109/CLEOE-IQEC.2013.6801236

Nanometrology using localized surface plasmon resonance spectroscopy

Claus Jeppesen, Daniel N. Lindstedt, Asger V. Laurberg, Anders Kristensen, N. Asger Mortensen

Danish Technological Institute

Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review

Abstract

A novel optical characterization technique called localized surface plasmon resonance (LSPR) spectroscopy is presented. LSPR spectroscopy exploits light excited surface plasmons, which are collective coherent electron oscillations at a metal/dielectric interface. The LSPR can be observed in a transmission spectrum and it is very sensitive to the constituent materials as well as both lateral and vertical dimensions of the structures. This makes LSPR spectroscopy interesting for a number of applications including nanometrology. Like scatterometry, LSPR spectroscopy requires test structures and computer simulations to establish the correlation between spectra and physical dimensions. Instead of measuring on individual structures like CD-SEM and AFM, LSPR spectroscopy measures on an array of test structures with an arbitrary array size. This makes LSPR spectroscopy particularly interesting for dense device layers where the vacant space for test structures is limited.In this work, LSPR spectroscopy is used to evaluate a fabrication process including imprinting, etching and metallisation of gammadion test structures distributed on a 4” wafer.

Original language	English
Title of host publication	Proceedings of CLEO Europe 2013
Number of pages	1
Publisher	IEEE
Publication date	2013
Pages	1
ISBN (Print)	978-1-4799-0593-5
DOIs	https://doi.org/10.1109/CLEOE-IQEC.2013.6801236
Publication status	Published - 2013
Event	Conference on Lasers and Electro-Optics Europe 2013 (CLEO Europe): International Quantum Electronics Conference (IQEC) - Münich, Germany Duration: 12 May 2013 → 16 May 2013

Conference

Conference	Conference on Lasers and Electro-Optics Europe 2013 (CLEO Europe)
Country/Territory	Germany
City	Münich
Period	12/05/2013 → 16/05/2013

Keywords

etching
metallisation
optical testing
spectroscopy
surface plasmon resonance
Aerospace
Bioengineering
Communication, Networking and Broadcast Technologies
Components, Circuits, Devices and Systems
Engineered Materials, Dielectrics and Plasmas
Engineering Profession
Fields, Waves and Electromagnetics
General Topics for Engineers
Nuclear Engineering
Photonics and Electrooptics
Power, Energy and Industry Applications
collective coherent electron oscillations
Correlation
dense device layers
Educational institutions
fabrication process
gammadion test structures
imprinting
light excited surface plasmons
localized surface plasmon resonance spectroscopy
LSPR spectroscopy
metal-dielectric interface
nanometrology
Nanotechnology
optical characterization technique
Plasmons
scatterometry
Size measurement
Spectroscopy
transmission spectrum
Uncertainty

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10.1109/CLEOE-IQEC.2013.6801236

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title = "Nanometrology using localized surface plasmon resonance spectroscopy",

abstract = "A novel optical characterization technique called localized surface plasmon resonance (LSPR) spectroscopy is presented. LSPR spectroscopy exploits light excited surface plasmons, which are collective coherent electron oscillations at a metal/dielectric interface. The LSPR can be observed in a transmission spectrum and it is very sensitive to the constituent materials as well as both lateral and vertical dimensions of the structures. This makes LSPR spectroscopy interesting for a number of applications including nanometrology. Like scatterometry, LSPR spectroscopy requires test structures and computer simulations to establish the correlation between spectra and physical dimensions. Instead of measuring on individual structures like CD-SEM and AFM, LSPR spectroscopy measures on an array of test structures with an arbitrary array size. This makes LSPR spectroscopy particularly interesting for dense device layers where the vacant space for test structures is limited.In this work, LSPR spectroscopy is used to evaluate a fabrication process including imprinting, etching and metallisation of gammadion test structures distributed on a 4” wafer.",

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author = "Claus Jeppesen and Lindstedt, {Daniel N.} and Laurberg, {Asger V.} and Anders Kristensen and Mortensen, {N. Asger}",

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booktitle = "Proceedings of CLEO Europe 2013",

publisher = "IEEE",

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AU - Laurberg, Asger V.

AU - Kristensen, Anders

AU - Mortensen, N. Asger

PY - 2013

Y1 - 2013

N2 - A novel optical characterization technique called localized surface plasmon resonance (LSPR) spectroscopy is presented. LSPR spectroscopy exploits light excited surface plasmons, which are collective coherent electron oscillations at a metal/dielectric interface. The LSPR can be observed in a transmission spectrum and it is very sensitive to the constituent materials as well as both lateral and vertical dimensions of the structures. This makes LSPR spectroscopy interesting for a number of applications including nanometrology. Like scatterometry, LSPR spectroscopy requires test structures and computer simulations to establish the correlation between spectra and physical dimensions. Instead of measuring on individual structures like CD-SEM and AFM, LSPR spectroscopy measures on an array of test structures with an arbitrary array size. This makes LSPR spectroscopy particularly interesting for dense device layers where the vacant space for test structures is limited.In this work, LSPR spectroscopy is used to evaluate a fabrication process including imprinting, etching and metallisation of gammadion test structures distributed on a 4” wafer.

AB - A novel optical characterization technique called localized surface plasmon resonance (LSPR) spectroscopy is presented. LSPR spectroscopy exploits light excited surface plasmons, which are collective coherent electron oscillations at a metal/dielectric interface. The LSPR can be observed in a transmission spectrum and it is very sensitive to the constituent materials as well as both lateral and vertical dimensions of the structures. This makes LSPR spectroscopy interesting for a number of applications including nanometrology. Like scatterometry, LSPR spectroscopy requires test structures and computer simulations to establish the correlation between spectra and physical dimensions. Instead of measuring on individual structures like CD-SEM and AFM, LSPR spectroscopy measures on an array of test structures with an arbitrary array size. This makes LSPR spectroscopy particularly interesting for dense device layers where the vacant space for test structures is limited.In this work, LSPR spectroscopy is used to evaluate a fabrication process including imprinting, etching and metallisation of gammadion test structures distributed on a 4” wafer.

KW - etching

KW - metallisation

KW - optical testing

KW - spectroscopy

KW - surface plasmon resonance

KW - Aerospace

KW - Bioengineering

KW - Communication, Networking and Broadcast Technologies

KW - Components, Circuits, Devices and Systems

KW - Engineered Materials, Dielectrics and Plasmas

KW - Engineering Profession

KW - Fields, Waves and Electromagnetics

KW - General Topics for Engineers

KW - Nuclear Engineering

KW - Photonics and Electrooptics

KW - Power, Energy and Industry Applications

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KW - Size measurement

KW - Spectroscopy

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KW - Uncertainty

U2 - 10.1109/CLEOE-IQEC.2013.6801236

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BT - Proceedings of CLEO Europe 2013

PB - IEEE

T2 - Conference on Lasers and Electro-Optics Europe 2013 (CLEO Europe)

Y2 - 12 May 2013 through 16 May 2013

ER -

Nanometrology using localized surface plasmon resonance spectroscopy

Abstract

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Keywords

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