Nanomechanical Pyrolytic Carbon Resonators: Novel Fabrication Method and Characterization of Mechanical Properties

Maksymilian Kurek; Frederik K. Larsen; Peter Emil Larsen; Silvan Schmid; Anja Boisen; Stephan Sylvest Keller

doi:10.3390/s16071097

Nanomechanical Pyrolytic Carbon Resonators: Novel Fabrication Method and Characterization of Mechanical Properties

Maksymilian Kurek
, Frederik K. Larsen
, Peter Emil Larsen
, Silvan Schmid
, Anja Boisen
, Stephan Sylvest Keller

Technical University of Denmark

Research output: Contribution to journal › Journal article › Research › peer-review

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Original language	English
Journal	Sensors
Volume	16
Issue number	7
Pages (from-to)	1097
Number of pages	11
ISSN	1424-8220
DOIs	https://doi.org/10.3390/s16071097
Publication status	Published - 2016

Keywords

MEMS
Resonators
Pyrolysis
Pyrolytic carbon
Microfabrication

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10.3390/s16071097

Nanomechanical Pyrolytic Carbon Resonators Novel Fabrication Method and Characterization ofFinal published version, 1.86 MB

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Cite this

@article{275cacb5bf414113aded25742a7d6fc8,

title = "Nanomechanical Pyrolytic Carbon Resonators: Novel Fabrication Method and Characterization of Mechanical Properties",

keywords = "MEMS, Resonators, Pyrolysis, Pyrolytic carbon, Microfabrication",

author = "Maksymilian Kurek and Larsen, \{Frederik K.\} and Larsen, \{Peter Emil\} and Silvan Schmid and Anja Boisen and Keller, \{Stephan Sylvest\}",

year = "2016",

doi = "10.3390/s16071097",

language = "English",

volume = "16",

pages = "1097",

journal = "Sensors",

issn = "1424-8220",

publisher = "Multidisciplinary Digital Publishing Institute (MDPI)",

number = "7",

}

TY - JOUR

T1 - Nanomechanical Pyrolytic Carbon Resonators: Novel Fabrication Method and Characterization of Mechanical Properties

AU - Kurek, Maksymilian

AU - Larsen, Frederik K.

AU - Larsen, Peter Emil

AU - Schmid, Silvan

AU - Boisen, Anja

AU - Keller, Stephan Sylvest

PY - 2016

Y1 - 2016

KW - MEMS

KW - Resonators

KW - Pyrolysis

KW - Pyrolytic carbon

KW - Microfabrication

U2 - 10.3390/s16071097

DO - 10.3390/s16071097

M3 - Journal article

C2 - 27428980

SN - 1424-8220

VL - 16

SP - 1097

JO - Sensors

JF - Sensors

IS - 7

ER -