Nanomechanical Pyrolytic Carbon Resonators: Novel Fabrication Method and Characterization of Mechanical Properties

Maksymilian Kurek, Frederik K. Larsen, Peter Emil Larsen, Silvan Schmid, Anja Boisen, Stephan Sylvest Keller

Research output: Contribution to journalJournal articleResearchpeer-review

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Original languageEnglish
JournalSensors
Volume16
Issue number7
Pages (from-to)1097
Number of pages11
ISSN1424-8220
DOIs
Publication statusPublished - 2016

Keywords

  • MEMS
  • Resonators
  • Pyrolysis
  • Pyrolytic carbon
  • Microfabrication

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