Nanomechanical Pyrolytic Carbon Resonators: Novel Fabrication Method and Characterization of Mechanical Properties

Maksymilian Kurek, Frederik K. Larsen, Peter Emil Larsen, Silvan Schmid, Anja Boisen, Stephan Sylvest Keller

    Research output: Contribution to journalJournal articleResearchpeer-review

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    Original languageEnglish
    JournalSensors
    Volume16
    Issue number7
    Pages (from-to)1097
    Number of pages11
    ISSN1424-8220
    DOIs
    Publication statusPublished - 2016

    Keywords

    • MEMS
    • Resonators
    • Pyrolysis
    • Pyrolytic carbon
    • Microfabrication

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