Nanomechanical Pyrolytic Carbon Resonators: Novel Fabrication Method and Characterization of Mechanical Properties

Maksymilian Kurek; Frederik K. Larsen; Peter Emil Larsen; Silvan Schmid; Anja Boisen; Stephan Sylvest Keller

doi:10.3390/s16071097

Nanomechanical Pyrolytic Carbon Resonators: Novel Fabrication Method and Characterization of Mechanical Properties

Maksymilian Kurek, Frederik K. Larsen, Peter Emil Larsen, Silvan Schmid, Anja Boisen, Stephan Sylvest Keller

Center for Intelligent Drug Delivery and Sensing Using Microcontainers and Nanomechanics

Research output: Contribution to journal › Journal article › Research › peer-review

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Original language	English
Journal	Sensors
Volume	16
Issue number	7
Pages (from-to)	1097
Number of pages	11
ISSN	1424-8220
DOIs	https://doi.org/10.3390/s16071097
Publication status	Published - 2016

Keywords

MEMS
Resonators
Pyrolysis
Pyrolytic carbon
Microfabrication

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10.3390/s16071097

Nanomechanical Pyrolytic Carbon Resonators Novel Fabrication Method and Characterization ofFinal published version, 1.86 MB

Cite this

@article{275cacb5bf414113aded25742a7d6fc8,

title = "Nanomechanical Pyrolytic Carbon Resonators: Novel Fabrication Method and Characterization of Mechanical Properties",

keywords = "MEMS, Resonators, Pyrolysis, Pyrolytic carbon, Microfabrication",

author = "Maksymilian Kurek and Larsen, {Frederik K.} and Larsen, {Peter Emil} and Silvan Schmid and Anja Boisen and Keller, {Stephan Sylvest}",

year = "2016",

doi = "10.3390/s16071097",

language = "English",

volume = "16",

pages = "1097",

journal = "Sensors",

issn = "1424-8220",

publisher = "M D P I AG",

number = "7",

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T1 - Nanomechanical Pyrolytic Carbon Resonators: Novel Fabrication Method and Characterization of Mechanical Properties

AU - Kurek, Maksymilian

AU - Larsen, Frederik K.

AU - Larsen, Peter Emil

AU - Schmid, Silvan

AU - Boisen, Anja

AU - Keller, Stephan Sylvest

PY - 2016

Y1 - 2016

KW - MEMS

KW - Resonators

KW - Pyrolysis

KW - Pyrolytic carbon

KW - Microfabrication

U2 - 10.3390/s16071097

DO - 10.3390/s16071097

M3 - Journal article

C2 - 27428980

VL - 16

SP - 1097

JO - Sensors

JF - Sensors

SN - 1424-8220

IS - 7

ER -