Nanomechanical devices for mass detection realized by laser and atomic force microscopy and compatible with CMOS technology

G. Abadal, Zachary James Davis, Bjarne Helbo, R. Ruiz, F. Pérez-Murano, F. Campabadal, J. Esteve, E. Figueras, Anja Boisen, N. Barniol

    Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

    Original languageEnglish
    Title of host publicationProceedings of Eurosensors XIV
    Place of PublicationCopenhagen, Denmark
    Publication date2000
    Pages487-490
    Publication statusPublished - 2000

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