Nanoimprinting reflow modified moth-eye structures in chalcogenide glass for enhanced broadband antireflection in the mid-infrared

Mikkel Lotz, Julius Needham, Mogens H. Jakobsen, Rafael Taboryski*

*Corresponding author for this work

Research output: Contribution to journalJournal articleResearchpeer-review

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Abstract

We report on the progress towards developing a new method for fabricating more efficient, broadband antireflective (AR) moth-eye structures in As2Se3 via a direct nanoimprinting technique. Thermal reflow is used during mold fabrication to reshape a conventional deep-ultraviolet lithography in order to promote a pattern transfer of “secant ogive”-like moth-eye structures. Once replicated, structures modified by reflow displayed greater AR efficiency compared to structures replicated by a conventional mold, achieving the highest spectrum-averaged transmittance improvement of 12.36% from 3.3 to 12 μm.
Original languageEnglish
JournalOptics Letters
Volume44
Issue number17
Pages (from-to)4383-4386
Number of pages4
ISSN0146-9592
DOIs
Publication statusPublished - 2019

Cite this

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title = "Nanoimprinting reflow modified moth-eye structures in chalcogenide glass for enhanced broadband antireflection in the mid-infrared",
abstract = "We report on the progress towards developing a new method for fabricating more efficient, broadband antireflective (AR) moth-eye structures in As2Se3 via a direct nanoimprinting technique. Thermal reflow is used during mold fabrication to reshape a conventional deep-ultraviolet lithography in order to promote a pattern transfer of “secant ogive”-like moth-eye structures. Once replicated, structures modified by reflow displayed greater AR efficiency compared to structures replicated by a conventional mold, achieving the highest spectrum-averaged transmittance improvement of 12.36{\%} from 3.3 to 12 μm.",
author = "Mikkel Lotz and Julius Needham and Jakobsen, {Mogens H.} and Rafael Taboryski",
year = "2019",
doi = "10.1364/OL.44.004383",
language = "English",
volume = "44",
pages = "4383--4386",
journal = "Optics Letters",
issn = "0146-9592",
publisher = "Optical Society of America",
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}

Nanoimprinting reflow modified moth-eye structures in chalcogenide glass for enhanced broadband antireflection in the mid-infrared. / Lotz, Mikkel ; Needham, Julius; Jakobsen, Mogens H.; Taboryski, Rafael .

In: Optics Letters, Vol. 44, No. 17, 2019, p. 4383-4386.

Research output: Contribution to journalJournal articleResearchpeer-review

TY - JOUR

T1 - Nanoimprinting reflow modified moth-eye structures in chalcogenide glass for enhanced broadband antireflection in the mid-infrared

AU - Lotz, Mikkel

AU - Needham, Julius

AU - Jakobsen, Mogens H.

AU - Taboryski, Rafael

PY - 2019

Y1 - 2019

N2 - We report on the progress towards developing a new method for fabricating more efficient, broadband antireflective (AR) moth-eye structures in As2Se3 via a direct nanoimprinting technique. Thermal reflow is used during mold fabrication to reshape a conventional deep-ultraviolet lithography in order to promote a pattern transfer of “secant ogive”-like moth-eye structures. Once replicated, structures modified by reflow displayed greater AR efficiency compared to structures replicated by a conventional mold, achieving the highest spectrum-averaged transmittance improvement of 12.36% from 3.3 to 12 μm.

AB - We report on the progress towards developing a new method for fabricating more efficient, broadband antireflective (AR) moth-eye structures in As2Se3 via a direct nanoimprinting technique. Thermal reflow is used during mold fabrication to reshape a conventional deep-ultraviolet lithography in order to promote a pattern transfer of “secant ogive”-like moth-eye structures. Once replicated, structures modified by reflow displayed greater AR efficiency compared to structures replicated by a conventional mold, achieving the highest spectrum-averaged transmittance improvement of 12.36% from 3.3 to 12 μm.

U2 - 10.1364/OL.44.004383

DO - 10.1364/OL.44.004383

M3 - Journal article

VL - 44

SP - 4383

EP - 4386

JO - Optics Letters

JF - Optics Letters

SN - 0146-9592

IS - 17

ER -