Nanoimprint lithography in Topas, a highly UV-transparent and chemically resistant thermoplast

Theodor Nielsen, Daniel Nilsson, Oliver Geschke, Peixiong Shi, Anders Kristensen

Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review

Conference	IEEE NDSI
Period	01/01/2004 → …

OpenUrl availability

@inproceedings{02614ce7d2da4a719b7958fb85a7941c,

title = "Nanoimprint lithography in Topas, a highly UV-transparent and chemically resistant thermoplast",

author = "Theodor Nielsen and Daniel Nilsson and Oliver Geschke and Peixiong Shi and Anders Kristensen",

year = "2004",

language = "English",

booktitle = "Proceedings of IEEE NDSI 2004",

note = "IEEE NDSI ; Conference date: 01-01-2004",

}