Nanoimprint lithography fabrication of photonic crystal devices

Anders Kristensen, L.H. Frandsen, Brian Bilenberg Olsen, Theodor Nielsen, M. Vogler, P.I. Borel

    Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

    Original languageEnglish
    Title of host publicationProceedings of the conference on Ultimate Lithography and Nanofabrication for Electronic and Life Science
    Publication date2006
    Publication statusPublished - 2006
    EventThe conference on Ultimate Lithography and Nanofabrication for Electronic and Life Science - Marseille, France
    Duration: 26 Jun 200630 Jun 2006

    Conference

    ConferenceThe conference on Ultimate Lithography and Nanofabrication for Electronic and Life Science
    CountryFrance
    CityMarseille
    Period26/06/200630/06/2006

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