Nanoimprint Lithography

Helmut Schift, Anders Kristensen

    Research output: Chapter in Book/Report/Conference proceedingBook chapterResearchpeer-review

    Original languageEnglish
    Title of host publicationSpringer Handbook of Nanotechnology
    EditorsBharat Bhushan
    VolumeChapter 8
    Place of PublicationBerlin. Heidelberg
    Publication date2007
    ISBN (Print)3-540-29855-x, 978-3-540-29855-7
    Publication statusPublished - 2007

    Cite this

    Schift, H., & Kristensen, A. (2007). Nanoimprint Lithography. In B. Bhushan (Ed.), Springer Handbook of Nanotechnology (2nd ed., Vol. Chapter 8). Springer.