Nanoimprint Lithography

Helmut Schift, Anders Kristensen

    Research output: Chapter in Book/Report/Conference proceedingBook chapterResearchpeer-review

    Original languageEnglish
    Title of host publicationSpringer Handbook of Nanotechnology
    EditorsBharat Bhushan
    VolumeChapter 8
    Place of PublicationBerlin. Heidelberg
    PublisherSpringer
    Publication date2007
    Edition2nd
    ISBN (Print)3-540-29855-x, 978-3-540-29855-7
    Publication statusPublished - 2007

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