Abstract
We report fabrication and characterization of nanochannel devices
with two nanopores in series for resistive-pulse sensing of hepatitis B virus (HBV)
capsids. The nanochannel and two pores are patterned by electron beam lithography
between two microchannels and etched by reactive ion etching. The two
nanopores are 50-nm wide, 50-nm deep, and 40-nm long and are spaced 2.0-μm
apart. The nanochannel that brackets the two pores is 20 wider (1 μm) to reduce
the electrical resistance adjacent to the two pores and to ensure the current returns
to its baseline value between resistive-pulse events. Average pulse amplitudes differ
by
Original language | English |
---|---|
Journal | Analytical Chemistry |
Volume | 83 |
Pages (from-to) | 9573-9578 |
ISSN | 0003-2700 |
DOIs | |
Publication status | Published - 2011 |