Nanochemical surface analyzer in CMOS technology

W. Franks, D. Lange, Seunghwan Lee, A. Hierlemann, N. D. Spencer, H. Baltes

Research output: Contribution to journalJournal articleResearchpeer-review

Original languageEnglish
JournalUltramicroscopy
Volume91
Issue number1-4
Pages (from-to)21-27
ISSN0304-3991
Publication statusPublished - 2002
Externally publishedYes

Cite this

Franks, W., Lange, D., Lee, S., Hierlemann, A., Spencer, N. D., & Baltes, H. (2002). Nanochemical surface analyzer in CMOS technology. Ultramicroscopy, 91(1-4), 21-27.