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Nanochannels for DNA stretching fabricated on wafer scale by nanoimprint lithography with a stamp fabricated by 100 kV electron beam lithography in SU-8

    Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

    Original languageEnglish
    Title of host publicationProceeding of the Internternational Conference on Micro and Nano Engineering, MNE 2005
    Publication date2005
    Publication statusPublished - 2005
    Event31st International Conference on Micro- and Nano-Engineering 2005 - Vienna, Austria
    Duration: 19 Sept 200522 Sept 2005
    Conference number: 31

    Conference

    Conference31st International Conference on Micro- and Nano-Engineering 2005
    Number31
    Country/TerritoryAustria
    CityVienna
    Period19/09/200522/09/2005

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