Nanocantilever devices for mass detection - fabrication and characterization

Zachary James Davis, G. Abadal, Bjarne Helbo, Ole Hansen, Francois Grey, Anja Boisen

    Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

    Original languageEnglish
    Title of host publicationProceedings of 1st euspen topical conference on fabrication and metrology in nanotechnology
    Place of PublicationCopenhagen, Denmark
    Publication date2000
    Pages81-89
    Publication statusPublished - 2000

    Cite this