Nanobits, Nembranes and Micro Four-Point Probes: Customizable Tools for insitu Manipulation and Characterisation of Nanostructures

Peter Bøggild, Dirch Hjorth Petersen, Özlem Sardan Sukas, Henrik Friis Dam, Anders Lei, Tim Booth, Kristian Mølhave, Volkmar Eicchorn

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    Abstract

    We present a range of highly adaptable microtools for direct interaction with nanoscale structures; (i) semiautomatic pick-and-place assembly of multiwalled carbon nanotubes onto cantilevers for high-aspect ratio scanning probe microscopy, using electrothermal microgrippers inside a SEM. Topology optimisation was used to calculate the optimal gripper shape defined by the boundary conditions, resulting in 10-100 times better performance. By instead pre-defining detachable tips using electron beam lithography, free-form scanning probe tips (Nanobits) can be mounted in virtually any position on a cantilever; (ii) scanning micro four point probes allow fast, non- destructive mapping of local electrical properties (sheet resistance and Hall mobility) and hysteresis effects of graphene sheets; (iii) sub 100 nm freestanding devices with wires, heaters, actuators, sensors, resonators and probes were defined in a 100 nm thin membrane with focused ion beam milling. By patterning generic membrane templates (Nembranes) the fabrication time of a TEM compatible NEMS device is effectively reduced to less around 20 minutes.
    Original languageEnglish
    Title of host publicationBulletin of the American Physical Society
    Volume55/2
    Publication date2010
    PagesBAPS.2010.MAR.P15.2
    Publication statusPublished - 2010
    EventAPS March Meeting 2010 - Portland, Oregon
    Duration: 1 Jan 2010 → …

    Conference

    ConferenceAPS March Meeting 2010
    CityPortland, Oregon
    Period01/01/2010 → …

    Cite this

    Bøggild, P., Petersen, D. H., Sardan Sukas, Ö., Dam, H. F., Lei, A., Booth, T., ... Eicchorn, V. (2010). Nanobits, Nembranes and Micro Four-Point Probes: Customizable Tools for insitu Manipulation and Characterisation of Nanostructures. In Bulletin of the American Physical Society (Vol. 55/2, pp. BAPS.2010.MAR.P15.2)