We present a range of highly adaptable microtools for direct interaction with nanoscale structures; (i) semiautomatic pick-and-place assembly of multiwalled carbon nanotubes onto cantilevers for high-aspect ratio scanning probe microscopy, using electrothermal microgrippers inside a SEM. Topology optimisation was used to calculate the optimal gripper shape defined by the boundary conditions, resulting in 10-100 times better performance. By instead pre-defining detachable tips using electron beam lithography, free-form scanning probe tips (Nanobits) can be mounted in virtually any position on a cantilever; (ii) scanning micro four point probes allow fast, non- destructive mapping of local electrical properties (sheet resistance and Hall mobility) and hysteresis effects of graphene sheets; (iii) sub 100 nm freestanding devices with wires, heaters, actuators, sensors, resonators and probes were defined in a 100 nm thin membrane with focused ion beam milling. By patterning generic membrane templates (Nembranes) the fabrication time of a TEM compatible NEMS device is effectively reduced to less around 20 minutes.
|Title of host publication||Bulletin of the American Physical Society|
|Publication status||Published - 2010|
|Event||APS March Meeting 2010 - Portland, Oregon|
Duration: 1 Jan 2010 → …
|Conference||APS March Meeting 2010|
|Period||01/01/2010 → …|
Bøggild, P., Petersen, D. H.
, Sardan Sukas, Ö., Dam, H. F., Lei, A., Booth, T.
, ... Eicchorn, V. (2010). Nanobits, Nembranes and Micro Four-Point Probes: Customizable Tools for insitu Manipulation and Characterisation of Nanostructures
. In Bulletin of the American Physical Society
(Vol. 55/2, pp. BAPS.2010.MAR.P15.2)