Nanobits - exchangable and customisable scanning probe tips

Engineering

• Actuation 8%
• Adaptability 8%
• Aspect Ratio 8%
• Assembly Process 8%
• Atomic Force Microscopy 100%
• Bending Angle 8%
• Buckling 8%
• Critical Dimension 25%
• Electron Optical Lithography 8%
• Focused Ion Beam 8%
• High Aspect Ratio 25%
• Intrinsic Stress 8%
• Lateral Resolution 8%
• Main Driving Force 8%
• Microcantilevers 8%
• Microfabrication 16%
• Microgripper 8%
• Nanolithography 8%
• Nitride 8%
• Plane Bending 16%
• Polysilicon 8%
• Probe Tip 100%
• Residual Stress 16%
• Scanning Electron Microscope 8%
• Side Wall 16%
• Stiction 8%
• Surface Colour 8%
• Surface Topography 8%
• Tensiles 8%
• Thermal Force 8%
• Tip Diameter 33%

Material Science

• Focused Ion Beam 100%
• Lithography 16%
• Microfabrication 33%
• Optical Imaging 16%
• Reactive Ion Etching 33%
• Residual Stress 33%
• Scanning Electron Microscopy 16%
• Silicon 33%
• Silicon Nitride 16%
• Surface Topography 16%
• Theoretical Modeling 16%

Keyphrases

• Bending Mechanism 5%
• Bimorph Structure 10%
• Compressive Buckling 5%
• FIB Milling 15%
• In Situ Replacement 5%
• Physical Etching 5%
• Scanning Probe Methods 5%
• Sidewall Profile 5%
• Silicidation 5%
• Temperature Reversal 5%