Nano-scale silicon structures by using Carbon nanotubes as reactive ion mask

M.S. Schmidt, Theodor Nielsen, D.N. Madsen, Anders Kristensen, Peter Bøggild

Research output: Contribution to journal › Journal article › Research › peer-review

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@article{5f595244a97a4596a00d867f64d58c31,

title = "Nano-scale silicon structures by using Carbon nanotubes as reactive ion mask",

author = "M.S. Schmidt and Theodor Nielsen and D.N. Madsen and Anders Kristensen and Peter B{\o}ggild",

year = "2005",

language = "English",

volume = "16",

pages = "750--753",

journal = "Nanotechnology",

issn = "0957-4484",

publisher = "IOP Publishing",

number = "6",

}