N2 dissociation in a matrix ECR plasma source

C. Irimiea, S.A. Chiper, Eugen Stamate

Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review

Original language	English
Title of host publication	Proceedings of International Symposium on Dry Process
Publication date	2012
Pages	69-70
ISBN (Print)	978-4-86348-289-0
Publication status	Published - 2012
Event	34th International Symposium on Dry Process (DPS2012) - Asano campus of the University of Tokyo, Tokyo, Japan Duration: 15 Nov 2012 → 16 Nov 2012

Conference	34th International Symposium on Dry Process (DPS2012)
Location	Asano campus of the University of Tokyo
Country/Territory	Japan
City	Tokyo
Period	15/11/2012 → 16/11/2012

OpenUrl availability

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title = "N2 dissociation in a matrix ECR plasma source",

author = "C. Irimiea and S.A. Chiper and Eugen Stamate",

year = "2012",

language = "English",

isbn = "978-4-86348-289-0",

pages = "69--70",

booktitle = "Proceedings of International Symposium on Dry Process",

note = "34th International Symposium on Dry Process (DPS2012), DPS ; Conference date: 15-11-2012 Through 16-11-2012",

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TY - GEN

T1 - N2 dissociation in a matrix ECR plasma source

AU - Irimiea, C.

AU - Chiper, S.A.

AU - Stamate, Eugen

PY - 2012

Y1 - 2012

M3 - Article in proceedings

SN - 978-4-86348-289-0

SP - 69

EP - 70

BT - Proceedings of International Symposium on Dry Process

T2 - 34th International Symposium on Dry Process (DPS2012)

Y2 - 15 November 2012 through 16 November 2012

ER -