Multivariate data analysis of process control data from neutron transmutation doping of silicon

K. Heydorn; N. Hegaard

doi:10.1016/0169-7439(93)E0079-J

Multivariate data analysis of process control data from neutron transmutation doping of silicon

K. Heydorn, N. Hegaard

Research output: Contribution to journal › Conference article › Research › peer-review

Abstract

Final resistivities obtained by neutron transmutation doping (NTD) of silicon can be measured only after an annealing process has been carried out at the manufacturer's plant. The reactor centre carrying out the neutron doping process by irradiation under selected conditions must control the process by indirect measurement of the product quality. The method of partial least squares was used to identify important parameters for improving the quality of the NTD-silicon, as well as for predicting the final quality data observed by the customer.

Original language	English
Journal	Chemometrics and Intelligent Laboratory Systems
Volume	23
Issue number	1
Pages (from-to)	191-196
ISSN	0169-7439
DOIs	https://doi.org/10.1016/0169-7439(93)E0079-J
Publication status	Published - 1994
Event	3rd Scandinavian Symposium on Chemometrics - Århus, Denmark Duration: 13 Jun 1993 → 17 Jun 1993 Conference number: 3

Conference

Conference	3rd Scandinavian Symposium on Chemometrics
Number	3
Country/Territory	Denmark
City	Århus
Period	13/06/1993 → 17/06/1993

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@inproceedings{bfefc0862c234e2ab0e78320ad980fc5,

title = "Multivariate data analysis of process control data from neutron transmutation doping of silicon",

abstract = "Final resistivities obtained by neutron transmutation doping (NTD) of silicon can be measured only after an annealing process has been carried out at the manufacturer's plant. The reactor centre carrying out the neutron doping process by irradiation under selected conditions must control the process by indirect measurement of the product quality. The method of partial least squares was used to identify important parameters for improving the quality of the NTD-silicon, as well as for predicting the final quality data observed by the customer. ",

keywords = "Materialer med s{\ae}rlige fysiske og kemiske egenskaber",

author = "K. Heydorn and N. Hegaard",

year = "1994",

doi = "10.1016/0169-7439(93)E0079-J",

language = "English",

volume = "23",

pages = "191--196",

journal = "Chemometrics and Intelligent Laboratory Systems",

issn = "0169-7439",

publisher = "Elsevier",

number = "1",

note = "3rd Scandinavian Symposium on Chemometrics, SSC3 ; Conference date: 13-06-1993 Through 17-06-1993",

}

TY - GEN

T1 - Multivariate data analysis of process control data from neutron transmutation doping of silicon

AU - Heydorn, K.

AU - Hegaard, N.

N1 - Conference code: 3

PY - 1994

Y1 - 1994

N2 - Final resistivities obtained by neutron transmutation doping (NTD) of silicon can be measured only after an annealing process has been carried out at the manufacturer's plant. The reactor centre carrying out the neutron doping process by irradiation under selected conditions must control the process by indirect measurement of the product quality. The method of partial least squares was used to identify important parameters for improving the quality of the NTD-silicon, as well as for predicting the final quality data observed by the customer.

AB - Final resistivities obtained by neutron transmutation doping (NTD) of silicon can be measured only after an annealing process has been carried out at the manufacturer's plant. The reactor centre carrying out the neutron doping process by irradiation under selected conditions must control the process by indirect measurement of the product quality. The method of partial least squares was used to identify important parameters for improving the quality of the NTD-silicon, as well as for predicting the final quality data observed by the customer.

KW - Materialer med særlige fysiske og kemiske egenskaber

U2 - 10.1016/0169-7439(93)E0079-J

DO - 10.1016/0169-7439(93)E0079-J

M3 - Conference article

SN - 0169-7439

VL - 23

SP - 191

EP - 196

JO - Chemometrics and Intelligent Laboratory Systems

JF - Chemometrics and Intelligent Laboratory Systems

IS - 1

T2 - 3rd Scandinavian Symposium on Chemometrics

Y2 - 13 June 1993 through 17 June 1993

ER -

Multivariate data analysis of process control data from neutron transmutation doping of silicon

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