Multimodal Electrothermal Silicon Microgrippers for Nanotube Manipulation

Karin Nordström Andersen, Dirch Hjorth Petersen, Kenneth Carlson, Kristian Mølhave, Özlem Sardan Sukas, Andy Horsewell, Volkmar Eichhorn, S. Fatikow, Peter Bøggild

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Abstract

Microgrippers that are able to manipulate nanoobjects reproducibly are key components in 3-D nanomanipulation systems. We present here a monolithic electrothermal microgripper prepared by silicon microfabrication, and demonstrate pick-and-place of an as-grown carbon nanotube from a 2-D array onto a transmission electron microscopy grid, as a first step toward a reliable and precise pick-and-place process for carbon nanotubes.
Original languageEnglish
JournalIEEE Transactions on Nanotechnology
Volume8
Issue number1
Pages (from-to)76-85
ISSN1536-125X
DOIs
Publication statusPublished - 2009

Bibliographical note

Copyright: 2009 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE

Keywords

  • pick-and-place
  • Carbon nanotubes
  • microgrippers
  • nanomanipulation

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