Abstract
A multi-point probe for testing electrical properties of a number of specific locations of a test sample comprises a supporting body defining a first surface, a first multitude of conductive probe arms (101-101'''), each of the probe arms defining a proximal end and a distal end. The probe arms are connected to the supporting body (105) at the proximal ends, and the distal ends are freely extending from the supporting body, giving individually flexible motion to the probe arms. Each of the probe arms defines a maximum width perpendicular to its perpendicular bisector and parallel with its line of contact with the supporting body, and a maximum thickness perpendicular to its perpendicular bisector and its line of contact with the supporting body. Each of the probe arms has a specific area or point of contact (111-111''') at its distal end for contacting a specific location among the number of specific locations of the test sample. At least one of the probe arms has an extension defining a pointing distal end providing its specific area or point of contact located offset relative to its perpendicular bisector.
Original language | English |
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IPC | G01R1/073 |
Patent number | US2011285416 |
Filing date | 24/11/2011 |
Country/Territory | United States |
Priority date | 30/06/2009 |
Priority number | WO2009DK00161 |
Publication status | Published - 2011 |