Multi Degrees of Freedom Electro-Thermal Microactuators

Jacques Jonsmann; Ole Sigmund; Siebe Bouwstra

Multi Degrees of Freedom Electro-Thermal Microactuators

Jacques Jonsmann
, Ole Sigmund
, Siebe Bouwstra

Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review

Original language	English
Title of host publication	Proceedings of the 10th International Conference on Solid-State Sensors and Actuators
Publisher	The Institute of Electrical Engineers of Japan
Publication date	1999
Pages	1372-1375
Publication status	Published - 1999
Event	10th International Conference on Solid-State Sensors and Actuators (Transducers ’99) - Sendai, Japan Duration: 1 Jan 1999 → … Conference number: 10

Conference

Conference	10th International Conference on Solid-State Sensors and Actuators (Transducers ’99)
Number	10
Country/Territory	Japan
City	Sendai
Period	01/01/1999 → …

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@inproceedings{c629707138e543b794fa1d588e3017b7,

title = "Multi Degrees of Freedom Electro-Thermal Microactuators",

author = "Jacques Jonsmann and Ole Sigmund and Siebe Bouwstra",

year = "1999",

language = "English",

pages = "1372--1375",

booktitle = "Proceedings of the 10th International Conference on Solid-State Sensors and Actuators",

publisher = "The Institute of Electrical Engineers of Japan",

note = "10th International Conference on Solid-State Sensors and Actuators (Transducers {\textquoteright}99), Transducers {\textquoteright}99 ; Conference date: 01-01-1999",

}

Multi Degrees of Freedom Electro-Thermal Microactuators. / Jonsmann, Jacques; Sigmund, Ole; Bouwstra, Siebe.
Proceedings of the 10th International Conference on Solid-State Sensors and Actuators. The Institute of Electrical Engineers of Japan, 1999. p. 1372-1375.

Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review

TY - GEN

T1 - Multi Degrees of Freedom Electro-Thermal Microactuators

AU - Jonsmann, Jacques

AU - Sigmund, Ole

AU - Bouwstra, Siebe

N1 - Conference code: 10

PY - 1999

Y1 - 1999

M3 - Article in proceedings

SP - 1372

EP - 1375

BT - Proceedings of the 10th International Conference on Solid-State Sensors and Actuators

PB - The Institute of Electrical Engineers of Japan

T2 - 10th International Conference on Solid-State Sensors and Actuators (Transducers ’99)

Y2 - 1 January 1999

ER -