Monolithic integration of mass sensing nano-cantilevers with CMOS circuitry

Zachary James Davis, G. Abadal, Bjarne Helbo, Ole Hansen, F. Campabadal, F. Perez-Murano, J. Esteve, E. Figueras, J. Verd, N. Barniol, Anja Boisen

    Research output: Contribution to journalJournal articleResearchpeer-review

    Original languageEnglish
    JournalSensors and Actuators A-physical
    Volume105
    Issue number3
    Pages (from-to)311-319
    Publication statusPublished - 2003

    Cite this

    Davis, Z. J., Abadal, G., Helbo, B., Hansen, O., Campabadal, F., Perez-Murano, F., Esteve, J., Figueras, E., Verd, J., Barniol, N., & Boisen, A. (2003). Monolithic integration of mass sensing nano-cantilevers with CMOS circuitry. Sensors and Actuators A-physical, 105(3), 311-319.