Monolithic integration of mass sensing nano-cantilevers with CMOS circuitry

Zachary James Davis; G. Abadal; Bjarne Helbo; Ole Hansen; F. Campabadal; F. Perez-Murano; J. Esteve; E. Figueras; J. Verd; N. Barniol; Anja Boisen

Monolithic integration of mass sensing nano-cantilevers with CMOS circuitry

Zachary James Davis, G. Abadal, Bjarne Helbo, Ole Hansen, F. Campabadal, F. Perez-Murano, J. Esteve, E. Figueras, J. Verd, N. Barniol, Anja Boisen

Research output: Contribution to journal › Journal article › Research › peer-review

Original language	English
Journal	Sensors and Actuators A-physical
Volume	105
Issue number	3
Pages (from-to)	311-319
Publication status	Published - 2003

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@article{d2a049fe9b504610be4f3912abe4870c,

title = "Monolithic integration of mass sensing nano-cantilevers with CMOS circuitry",

author = "Davis, {Zachary James} and G. Abadal and Bjarne Helbo and Ole Hansen and F. Campabadal and F. Perez-Murano and J. Esteve and E. Figueras and J. Verd and N. Barniol and Anja Boisen",

year = "2003",

language = "English",

volume = "105",

pages = "311--319",

journal = "Sensors and Actuators A-physical",

issn = "1873-3069",

publisher = "Elsevier",

number = "3",

}

TY - JOUR

T1 - Monolithic integration of mass sensing nano-cantilevers with CMOS circuitry

AU - Davis, Zachary James

AU - Abadal, G.

AU - Helbo, Bjarne

AU - Hansen, Ole

AU - Campabadal, F.

AU - Perez-Murano, F.

AU - Esteve, J.

AU - Figueras, E.

AU - Verd, J.

AU - Barniol, N.

AU - Boisen, Anja

PY - 2003

Y1 - 2003

M3 - Journal article

SN - 1873-3069

VL - 105

SP - 311

EP - 319

JO - Sensors and Actuators A-physical

JF - Sensors and Actuators A-physical

IS - 3

ER -