Monolithic integration of mass sensing nano-cantilevers with CMOS circuitry

Zachary James Davis, G. Abadal, Bjarne Helbo, Ole Hansen, F. Campabadal, F. Perez-Murano, J. Esteve, E. Figueras, J. Verd, N. Barniol, Anja Boisen

    Research output: Contribution to journalJournal articleResearchpeer-review

    Original languageEnglish
    JournalSensors and Actuators A-physical
    Issue number3
    Pages (from-to)311-319
    Publication statusPublished - 2003

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