Monolithic integration of InP on Si by molten alloy driven selective area epitaxial growth

Dmitrii V. Viazmitinov, Yury Berdnikov, Shima Kadkhodazadeh, Anna Dragunova, Nickolay Sibirev, Natalia Kryzhanovskaya, Ilya Radko, Alexander Huck, Kresten Yvind, Elizaveta Semenova*

*Corresponding author for this work

Research output: Contribution to journalJournal articleResearchpeer-review

116 Downloads (Pure)


We report a new approach for monolithic integration of III-V materials into silicon, based on selective area growth and driven by a molten alloy in metal-organic vapor epitaxy. Our method includes elements of both selective area and droplet-mediated growths and combines the advantages of the two techniques. Using this approach, we obtain organized arrays of high crystalline quality InP insertions into (100) oriented Si substrates. Our detailed structural, morphological and optical studies reveal the conditions leading to defect formation. These conditions are then eliminated to optimize the process for obtaining dislocation-free InP nanostructures grown directly on Si and buried below the top surface. The PL signal from these structures exhibits a narrow peak at the InP bandgap energy. The fundamental aspects of the growth are studied by modeling the InP nucleation process. The model is fitted by our x-ray diffraction measurements and correlates well with the results of our transmission electron microscopy and optical investigations. Our method constitutes a new approach for the monolithic integration of active III-V material into Si platform and opens up new opportunities in active Si photonics.
Original languageEnglish
Issue number46
Pages (from-to)23780-23788
Publication statusPublished - 2020


Dive into the research topics of 'Monolithic integration of InP on Si by molten alloy driven selective area epitaxial growth'. Together they form a unique fingerprint.

Cite this