Monolithic integration of DUV-induced waveguides into plastic microfluidic chip for optical manipulation

Maria Khoury Arvelo; Christoph Vannahme; Kristian Tølbøl Sørensen; A. Kristensen; Kirstine Berg-Sørensen

doi:10.1016/j.mee.2014.02.022

Monolithic integration of DUV-induced waveguides into plastic microfluidic chip for optical manipulation

Maria Khoury Arvelo, Christoph Vannahme, Kristian Tølbøl Sørensen, A. Kristensen, Kirstine Berg-Sørensen

Research output: Contribution to journal › Journal article › Research › peer-review

Abstract

A monolithic polymer optofluidic chip for manipulation of microbeads in flow is demonstrated. On this chip, polymer waveguides induced by Deep UV lithography are integrated with microfluidic channels. The optical propagation losses of the waveguides are measured to be 0.66±0.13 dB/mm at a wavelength of λ = 808 nm. An optimized bead tracking algorithm is implemented, allowing for determination of the optical forces acting on the particles. The algorithm features a spatio-temporal mapping of coordinates for uniting partial trajectories, without increased processing time. With an external laser power of 250 mW, a maximum scattering force of 0.84 pN is achieved for 5 μm diameter polystyrene beads in water. © 2014 Elsevier B.V. All rights reserved.

Original language	English
Journal	Microelectronic Engineering
Volume	121
Pages (from-to)	5-9
Number of pages	5
ISSN	0167-9317
DOIs	https://doi.org/10.1016/j.mee.2014.02.022
Publication status	Published - 2014

Keywords

Optical manipulation
DUV-induced waveguides
Optofluidics
All-polymer
Hot embossing

Access to Document

10.1016/j.mee.2014.02.022

Cite this

Khoury Arvelo, M., Vannahme, C., Sørensen, K. T., Kristensen, A., & Berg-Sørensen, K. (2014). Monolithic integration of DUV-induced waveguides into plastic microfluidic chip for optical manipulation. Microelectronic Engineering, 121, 5-9. https://doi.org/10.1016/j.mee.2014.02.022

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title = "Monolithic integration of DUV-induced waveguides into plastic microfluidic chip for optical manipulation",

abstract = "A monolithic polymer optofluidic chip for manipulation of microbeads in flow is demonstrated. On this chip, polymer waveguides induced by Deep UV lithography are integrated with microfluidic channels. The optical propagation losses of the waveguides are measured to be 0.66±0.13 dB/mm at a wavelength of λ = 808 nm. An optimized bead tracking algorithm is implemented, allowing for determination of the optical forces acting on the particles. The algorithm features a spatio-temporal mapping of coordinates for uniting partial trajectories, without increased processing time. With an external laser power of 250 mW, a maximum scattering force of 0.84 pN is achieved for 5 μm diameter polystyrene beads in water. {\textcopyright} 2014 Elsevier B.V. All rights reserved.",

keywords = "Optical manipulation, DUV-induced waveguides, Optofluidics, All-polymer, Hot embossing",

author = "{Khoury Arvelo}, Maria and Christoph Vannahme and S{\o}rensen, {Kristian T{\o}lb{\o}l} and A. Kristensen and Kirstine Berg-S{\o}rensen",

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doi = "10.1016/j.mee.2014.02.022",

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AU - Khoury Arvelo, Maria

AU - Vannahme, Christoph

AU - Sørensen, Kristian Tølbøl

AU - Kristensen, A.

AU - Berg-Sørensen, Kirstine

PY - 2014

Y1 - 2014

N2 - A monolithic polymer optofluidic chip for manipulation of microbeads in flow is demonstrated. On this chip, polymer waveguides induced by Deep UV lithography are integrated with microfluidic channels. The optical propagation losses of the waveguides are measured to be 0.66±0.13 dB/mm at a wavelength of λ = 808 nm. An optimized bead tracking algorithm is implemented, allowing for determination of the optical forces acting on the particles. The algorithm features a spatio-temporal mapping of coordinates for uniting partial trajectories, without increased processing time. With an external laser power of 250 mW, a maximum scattering force of 0.84 pN is achieved for 5 μm diameter polystyrene beads in water. © 2014 Elsevier B.V. All rights reserved.

AB - A monolithic polymer optofluidic chip for manipulation of microbeads in flow is demonstrated. On this chip, polymer waveguides induced by Deep UV lithography are integrated with microfluidic channels. The optical propagation losses of the waveguides are measured to be 0.66±0.13 dB/mm at a wavelength of λ = 808 nm. An optimized bead tracking algorithm is implemented, allowing for determination of the optical forces acting on the particles. The algorithm features a spatio-temporal mapping of coordinates for uniting partial trajectories, without increased processing time. With an external laser power of 250 mW, a maximum scattering force of 0.84 pN is achieved for 5 μm diameter polystyrene beads in water. © 2014 Elsevier B.V. All rights reserved.

KW - Optical manipulation

KW - DUV-induced waveguides

KW - Optofluidics

KW - All-polymer

KW - Hot embossing

U2 - 10.1016/j.mee.2014.02.022

DO - 10.1016/j.mee.2014.02.022

M3 - Journal article

VL - 121

SP - 5

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JO - Microelectronic Engineering

JF - Microelectronic Engineering

SN - 0167-9317

ER -