The effect of plasma treatment on glassy carbon (GC) surfaces was studied with adhesion improvement in mind. A newly constructed remote plasma source was used to treat GC plates. Pure He and a dilute NH3/He mixture were used as feed gases. Optical emission spectroscopy was performed for plasma torch diagnostics. The treatment resulted in surface etching, substantially enhanced by NH3, as well as a roughening of the surface as measured by atomic force microscopy. Furthermore, the treated area showed an increased wettability indicating the addition of polar functional groups to the surface. X-ray photoelectron spectroscopy confirmed the introduction of several oxygen and nitrogen containing surface functional groups. The adhesion to epoxy was dramatically improved after exposure to either plasma, the effect being largest when NH3 was present in the feed gas. © 2006 The Japan Society of Applied Physics.
- Surface treatment
- Optical emission spectroscopy
- Atmospheric pressure
- Dielectric barrier discharge
- Glassy carbon