Modelling the deformation process of flexible stamps for nanoimprint lithography

Mads Rostgaard Sonne

Research output: Book/Report › Ph.D. thesis

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Modelling the deformation process of flexible stamps for nanoimprint lithography
Sonne, M. R., Hattel, J. H., Tutum, C. C., Hansen, H. N., Taylor, H. & Kletschkowski, T.
1/3 FUU, 1/3 inst 1/3 Andet
01/04/2011 → 03/12/2014
Project: PhD