Modelling the deformation process of flexible stamps for nanoimprint lithography

Mads Rostgaard Sonne

Research output: Book/Report › Ph.D. thesis

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Modelling the deformation process of flexible stamps for nanoimprint lithography
Sonne, M. R. (PhD Student), Hattel, J. H. (Main Supervisor), Tutum, C. C. (Supervisor), Hansen, H. N. (Examiner), Taylor, H. (Examiner) & Kletschkowski, T. (Examiner)
1/3 FUU, 1/3 inst 1/3 Andet
01/04/2011 → 03/12/2014
Project: PhD