Modelling the deformation process of flexible stamps for nanoimprint lithography

Engineering

• Deformation Process 100%
• Nanoimprint Lithography 100%
• Manufacturing Process 50%
• Injection Moulding 50%
• Local Model 50%
• Numerical Model 50%
• Experimental Result 33%
• Simulation Result 33%
• Good Agreement 33%
• Axisymmetric 33%
• Microscale 33%
• Constitutive Model 33%
• Nanomaterial 33%
• Nanostructure 33%
• Linear Theory 16%
• Final Shape 16%
• Plastic Part 16%
• Test Machine 16%
• Strain Field 16%
• Nonlinear Phenomenon 16%
• Applied Load 16%
• Principal Strain 16%
• Stretch Ratio 16%
• Final Application 16%
• Numerical Modeling 16%
• Atomic Force Microscopy 16%
• Large Deformation 16%
• Tool Steel 16%
• Contact Condition 16%
• Nanoscale 16%
• Boundary Condition 16%
• Tensile Test 16%

Material Science

• Nanocrystalline Material 100%
• Lithography 100%
• Injection Molding 50%
• Silsesquioxane 33%
• Strain Measurement 16%
• Mechanical Property 16%
• Silicon 16%
• Tool Steel 16%
• Plastic Part 16%
• Contact Condition 16%
• Large Deformation 16%

Keyphrases

• Frictional Model 12%
• Silsesquioxane Polymer 12%
• Viscoelastic-viscoplastic Model 12%