Modelling of CMUTs with Anisotropic Plates

Mette Funding la Cour; Thomas Lehrmann Christiansen; Jørgen Arendt Jensen; Erik Vilain Thomsen

doi:10.1109/ULTSYM.2012.0146

Modelling of CMUTs with Anisotropic Plates

Mette Funding la Cour
, Thomas Lehrmann Christiansen
, Jørgen Arendt Jensen
, Erik Vilain Thomsen

Research output: Chapter in Book/Report/Conference proceeding › Article in proceedings › Research › peer-review

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Abstract

Traditionally, CMUTs are modelled using the isotropic plate equation and this leads to deviations between analytical calculations and FEM simulations. In this paper, the deflection profile and material parameters are calculated using the anisotropic plate equation. It is shown that the anisotropic calculations
match perfectly with FEM while an isotropic approach causes up to 10% deviations in deflection profile. Furthermore, we show how commonly used analytic modelling methods such as static calculations of the pull-in voltage and dynamic modelling through an equivalent circuit representation can be adjusted to
include the correct anisotropic behaviour by using an effective flexural rigidity. The anisotropic caluclations are also compared to experimental data from actual CMUTs showing an error of maximum 3%.

Original language	English
Title of host publication	Proceedings of IEEE International Ultrasonics Symposium
Publisher	IEEE
Publication date	2012
Pages	588-591
ISBN (Print)	9781467345613
DOIs	https://doi.org/10.1109/ULTSYM.2012.0146
Publication status	Published - 2012
Event	2012 IEEE International Ultrasonics Symposium - The International Congress Center, Dresden, Germany Duration: 7 Oct 2012 → 10 Oct 2012 https://ieeexplore.ieee.org/xpl/conhome/6552247/proceeding

Conference

Conference	2012 IEEE International Ultrasonics Symposium
Location	The International Congress Center
Country/Territory	Germany
City	Dresden
Period	07/10/2012 → 10/10/2012
Internet address	https://ieeexplore.ieee.org/xpl/conhome/6552247/proceeding

Keywords

Analytical models
Equations
Finite element analysis
Integrated circuit modeling
Mathematical model
Resonant frequency
Silicon

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10.1109/ULTSYM.2012.0146

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title = "Modelling of CMUTs with Anisotropic Plates",

abstract = "Traditionally, CMUTs are modelled using the isotropic plate equation and this leads to deviations between analytical calculations and FEM simulations. In this paper, the deflection profile and material parameters are calculated using the anisotropic plate equation. It is shown that the anisotropic calculations match perfectly with FEM while an isotropic approach causes up to 10\% deviations in deflection profile. Furthermore, we show how commonly used analytic modelling methods such as static calculations of the pull-in voltage and dynamic modelling through an equivalent circuit representation can be adjusted to include the correct anisotropic behaviour by using an effective flexural rigidity. The anisotropic caluclations are also compared to experimental data from actual CMUTs showing an error of maximum 3\%.",

keywords = "Analytical models, Equations, Finite element analysis, Integrated circuit modeling, Mathematical model, Resonant frequency, Silicon",

author = "\{la Cour\}, \{Mette Funding\} and Christiansen, \{Thomas Lehrmann\} and Jensen, \{J{\o}rgen Arendt\} and Thomsen, \{Erik Vilain\}",

year = "2012",

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AU - Christiansen, Thomas Lehrmann

AU - Jensen, Jørgen Arendt

AU - Thomsen, Erik Vilain

PY - 2012

Y1 - 2012

N2 - Traditionally, CMUTs are modelled using the isotropic plate equation and this leads to deviations between analytical calculations and FEM simulations. In this paper, the deflection profile and material parameters are calculated using the anisotropic plate equation. It is shown that the anisotropic calculations match perfectly with FEM while an isotropic approach causes up to 10% deviations in deflection profile. Furthermore, we show how commonly used analytic modelling methods such as static calculations of the pull-in voltage and dynamic modelling through an equivalent circuit representation can be adjusted to include the correct anisotropic behaviour by using an effective flexural rigidity. The anisotropic caluclations are also compared to experimental data from actual CMUTs showing an error of maximum 3%.

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KW - Analytical models

KW - Equations

KW - Finite element analysis

KW - Integrated circuit modeling

KW - Mathematical model

KW - Resonant frequency

KW - Silicon

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T2 - 2012 IEEE International Ultrasonics Symposium

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ER -

Modelling of CMUTs with Anisotropic Plates

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