Modelling of CMUTs with Anisotropic Plates

Mette Funding la Cour, Thomas Lehrmann Christiansen, Jørgen Arendt Jensen, Erik Vilain Thomsen

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Traditionally, CMUTs are modelled using the isotropic plate equation and this leads to deviations between analytical calculations and FEM simulations. In this paper, the deflection profile and material parameters are calculated using the anisotropic plate equation. It is shown that the anisotropic calculations
match perfectly with FEM while an isotropic approach causes up to 10% deviations in deflection profile. Furthermore, we show how commonly used analytic modelling methods such as static calculations of the pull-in voltage and dynamic modelling through an equivalent circuit representation can be adjusted to
include the correct anisotropic behaviour by using an effective flexural rigidity. The anisotropic caluclations are also compared to experimental data from actual CMUTs showing an error of maximum 3%.
Original languageEnglish
Title of host publicationProceedings of IEEE International Ultrasonics Symposium
Publication date2012
ISBN (Print)9781467345613
Publication statusPublished - 2012
Event2012 IEEE International Ultrasonics Symposium - The International Congress Center, Dresden, Germany
Duration: 7 Oct 201210 Oct 2012


Conference2012 IEEE International Ultrasonics Symposium
LocationThe International Congress Center
Internet address


  • Analytical models
  • Equations
  • Finite element analysis
  • Integrated circuit modeling
  • Mathematical model
  • Resonant frequency
  • Silicon

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