Modelling and Estimation of Wafer Yields and Defect Densities                from Microelectronics Test Structure..

C. K. Hansen, Poul Thyregod

Research output: Contribution to journal › Journal article › Research › peer-review

Original language	English
Journal	Quality and Reliability Engineering International.
Volume	12
Pages (from-to)	9-18
ISSN	0748-8017
Publication status	Published - 1996

OpenUrl availability

@article{839e8ed99cf34ec89e1b14c49d98f204,

title = "Modelling and Estimation of Wafer Yields and Defect Densities from Microelectronics Test Structure..",

author = "Hansen, {C. K.} and Poul Thyregod",

year = "1996",

language = "English",

volume = "12",

pages = "9--18",

journal = "Quality and Reliability Engineering International.",

issn = "0748-8017",

publisher = "JohnWiley & Sons Ltd.",

}