Modeling the mechanical deformation of PTFE flexible stamps for nanoimprint lithography on double-curved surfaces

Mads Rostgaard Sonne, K. Smistrup, J. Nørregaard, Jesper Henri Hattel

Research output: Contribution to conference › Conference abstract for conference › Research › peer-review

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Original language	English
Publication date	2013
Number of pages	2
Publication status	Published - 2013
Event	12th International Conference on Nanoimprint & Nanoprint Technology - Barcelona, Spain Duration: 21 Oct 2013 → 23 Oct 2013 Conference number: 12 http://www.nntconf.org/

Conference	12th International Conference on Nanoimprint & Nanoprint Technology
Number	12
Country/Territory	Spain
City	Barcelona
Period	21/10/2013 → 23/10/2013
Internet address	http://www.nntconf.org/

Access to Document

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title = "Modeling the mechanical deformation of PTFE flexible stamps for nanoimprint lithography on double-curved surfaces",

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year = "2013",

language = "English",

note = "12th International Conference on Nanoimprint & Nanoprint Technology, NNT ; Conference date: 21-10-2013 Through 23-10-2013",

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Modeling the mechanical deformation of PTFE flexible stamps for nanoimprint lithography on double-curved surfaces. / Sonne, Mads Rostgaard; Smistrup, K.; Nørregaard, J. et al.
2013. Abstract from 12th International Conference on Nanoimprint & Nanoprint Technology, Barcelona, Spain.

Research output: Contribution to conference › Conference abstract for conference › Research › peer-review

TY - ABST

T1 - Modeling the mechanical deformation of PTFE flexible stamps for nanoimprint lithography on double-curved surfaces

AU - Sonne, Mads Rostgaard

AU - Smistrup, K.

AU - Nørregaard, J.

AU - Hattel, Jesper Henri

N1 - Conference code: 12

PY - 2013

Y1 - 2013

M3 - Conference abstract for conference

T2 - 12th International Conference on Nanoimprint & Nanoprint Technology

Y2 - 21 October 2013 through 23 October 2013

ER -