Modeling the Kelvin polarization force actuation of Micro- and Nanomechanical systems

Silvan Schmid, C. Hierold, Anja Boisen

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    Abstract

    Polarization forces have become of high interest in micro- and nanomechanical systems. In this paper, an analytical model for a transduction scheme based on the Kelvin polarization force is presented. A dielectric beam is actuated by placing it over the gap of two coplanar electrodes. Finite element method simulations are used to characterize the scheme and to evaluate a field correction factor, which results from simplifying the form of the electric field. The model has been shown to be valid for dielectrics with different permittivities. The presented model facilitates the design of microresonators and nanoresonators with dielectric actuation, which offers a great freedom in the choice of structural material.
    Original languageEnglish
    JournalJournal of Applied Physics
    Volume107
    Issue number5
    ISSN0021-8979
    DOIs
    Publication statusPublished - 2010

    Bibliographical note

    Copyright (2010) American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics.

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