### Abstract

Most scanning probe microscopes use piezoelectric actuators in open loop configurations. Therefore a major problem related to these instruments is the image distortion due to the hysteresis effect of the piezo. In order to eliminate the distortions, cost effective software control based on a model for hysteresis can be applied to the scanner. We describe a new rate-independent model for the hysteresis of a piezo scanner. Two reference standards were used to determine the accuracy of the model; a one-dimensional grating with a period of 3.0 mum and a two-dimensional grating with 200 nm pitch. The structures were scanned for different scan ranges varying from 5 V peak to peak to 440 V peak to peak, so that 99% of the scanners' full motion range was covered. A least-squares fit of the experiments to the hysteresis model provided standard deviations per scan range of around 0.2%. This represents an uncertainty of 1 pixel. Since our model is based on a differential equation, it is flexible even to simulate arbitrary experimental conditions such as a sudden change in the offset

Original language | English |
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Journal | Journal of Vacuum Science and Technology. Part B. Microelectronics and Nanometer Structures |

Volume | 18 |

Issue number | 2 |

Pages (from-to) | 621-625 |

ISSN | 1071-1023 |

DOIs | |

Publication status | Published - 2000 |

## Cite this

Dirscherl, K., Garnæs, J., Nielsen, L., Jørgensen, J. F., & Sørensen, M. P. (2000). Modeling the hysteresis of a scanning probe microscope.

*Journal of Vacuum Science and Technology. Part B. Microelectronics and Nanometer Structures*,*18*(2), 621-625. https://doi.org/10.1116/1.591249