Modeling the constitutive and frictional behavior of PTFE flexible stamps for nanoimprint lithography

Research output: Contribution to journalJournal articleResearchpeer-review

Abstract

In the present work, the deformation on micro-scale of PTFE flexible stamps for nanoimprint lithography is modeled. This is achieved via a combination of proper models for the constitutive behavior as well as the frictional conditions between the deforming PTFE stamp and the steel tool. The model was verified through an experiment, where a PTFE sheet was deformed by a steel sphere mounted in a tensile test machine. Good agreement between simulations and experimental results is found, both regarding force–displacement and corresponding principal strain measurements. As expected, applying the correct
frictional behavior between PTFE and steel on micro-scale is shown to be of major importance in order to accurately simulate the strain field in the deformed PTFE stamp.
© 2013 Elsevier B.V. All rights reserved
Original languageEnglish
JournalMicroelectronic Engineering
Volume106
Pages (from-to)1-8
ISSN0167-9317
DOIs
Publication statusPublished - 2013

Keywords

  • Flexible stamps
  • Nanoimprint lithography (NIL)
  • PTFE constitutive model
  • Frictional behavior
  • Strain field measurements
  • FEM modeling

Cite this

@article{72e716aba71441ebb513ae3eb77824f1,
title = "Modeling the constitutive and frictional behavior of PTFE flexible stamps for nanoimprint lithography",
abstract = "In the present work, the deformation on micro-scale of PTFE flexible stamps for nanoimprint lithography is modeled. This is achieved via a combination of proper models for the constitutive behavior as well as the frictional conditions between the deforming PTFE stamp and the steel tool. The model was verified through an experiment, where a PTFE sheet was deformed by a steel sphere mounted in a tensile test machine. Good agreement between simulations and experimental results is found, both regarding force–displacement and corresponding principal strain measurements. As expected, applying the correctfrictional behavior between PTFE and steel on micro-scale is shown to be of major importance in order to accurately simulate the strain field in the deformed PTFE stamp.{\circledC} 2013 Elsevier B.V. All rights reserved",
keywords = "Flexible stamps, Nanoimprint lithography (NIL), PTFE constitutive model, Frictional behavior, Strain field measurements, FEM modeling",
author = "Sonne, {Mads Rostgaard} and Hattel, {Jesper Henri}",
year = "2013",
doi = "10.1016/j.mee.2013.01.049",
language = "English",
volume = "106",
pages = "1--8",
journal = "Microelectronic Engineering",
issn = "0167-9317",
publisher = "Elsevier",

}

Modeling the constitutive and frictional behavior of PTFE flexible stamps for nanoimprint lithography. / Sonne, Mads Rostgaard; Hattel, Jesper Henri.

In: Microelectronic Engineering, Vol. 106, 2013, p. 1-8.

Research output: Contribution to journalJournal articleResearchpeer-review

TY - JOUR

T1 - Modeling the constitutive and frictional behavior of PTFE flexible stamps for nanoimprint lithography

AU - Sonne, Mads Rostgaard

AU - Hattel, Jesper Henri

PY - 2013

Y1 - 2013

N2 - In the present work, the deformation on micro-scale of PTFE flexible stamps for nanoimprint lithography is modeled. This is achieved via a combination of proper models for the constitutive behavior as well as the frictional conditions between the deforming PTFE stamp and the steel tool. The model was verified through an experiment, where a PTFE sheet was deformed by a steel sphere mounted in a tensile test machine. Good agreement between simulations and experimental results is found, both regarding force–displacement and corresponding principal strain measurements. As expected, applying the correctfrictional behavior between PTFE and steel on micro-scale is shown to be of major importance in order to accurately simulate the strain field in the deformed PTFE stamp.© 2013 Elsevier B.V. All rights reserved

AB - In the present work, the deformation on micro-scale of PTFE flexible stamps for nanoimprint lithography is modeled. This is achieved via a combination of proper models for the constitutive behavior as well as the frictional conditions between the deforming PTFE stamp and the steel tool. The model was verified through an experiment, where a PTFE sheet was deformed by a steel sphere mounted in a tensile test machine. Good agreement between simulations and experimental results is found, both regarding force–displacement and corresponding principal strain measurements. As expected, applying the correctfrictional behavior between PTFE and steel on micro-scale is shown to be of major importance in order to accurately simulate the strain field in the deformed PTFE stamp.© 2013 Elsevier B.V. All rights reserved

KW - Flexible stamps

KW - Nanoimprint lithography (NIL)

KW - PTFE constitutive model

KW - Frictional behavior

KW - Strain field measurements

KW - FEM modeling

U2 - 10.1016/j.mee.2013.01.049

DO - 10.1016/j.mee.2013.01.049

M3 - Journal article

VL - 106

SP - 1

EP - 8

JO - Microelectronic Engineering

JF - Microelectronic Engineering

SN - 0167-9317

ER -