Modeling the constitutive and frictional behavior of PTFE flexible stamps for nanoimprint lithography

Mads Rostgaard Sonne, Jesper Henri Hattel

Research output: Contribution to journalJournal articleResearchpeer-review

Abstract

In the present work, the deformation on micro-scale of PTFE flexible stamps for nanoimprint lithography is modeled. This is achieved via a combination of proper models for the constitutive behavior as well as the frictional conditions between the deforming PTFE stamp and the steel tool. The model was verified through an experiment, where a PTFE sheet was deformed by a steel sphere mounted in a tensile test machine. Good agreement between simulations and experimental results is found, both regarding force–displacement and corresponding principal strain measurements. As expected, applying the correct
frictional behavior between PTFE and steel on micro-scale is shown to be of major importance in order to accurately simulate the strain field in the deformed PTFE stamp.
© 2013 Elsevier B.V. All rights reserved
Original languageEnglish
JournalMicroelectronic Engineering
Volume106
Pages (from-to)1-8
ISSN0167-9317
DOIs
Publication statusPublished - 2013

Keywords

  • Flexible stamps
  • Nanoimprint lithography (NIL)
  • PTFE constitutive model
  • Frictional behavior
  • Strain field measurements
  • FEM modeling

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