Modeling the constitutive and frictional behavior of PTFE flexible stamps for nanoimprint lithography

Mads Rostgaard Sonne; Jesper Henri Hattel

doi:10.1016/j.mee.2013.01.049

Modeling the constitutive and frictional behavior of PTFE flexible stamps for nanoimprint lithography

Mads Rostgaard Sonne, Jesper Henri Hattel

Research output: Contribution to journal › Journal article › Research › peer-review

Abstract

In the present work, the deformation on micro-scale of PTFE flexible stamps for nanoimprint lithography is modeled. This is achieved via a combination of proper models for the constitutive behavior as well as the frictional conditions between the deforming PTFE stamp and the steel tool. The model was verified through an experiment, where a PTFE sheet was deformed by a steel sphere mounted in a tensile test machine. Good agreement between simulations and experimental results is found, both regarding force–displacement and corresponding principal strain measurements. As expected, applying the correct
frictional behavior between PTFE and steel on micro-scale is shown to be of major importance in order to accurately simulate the strain field in the deformed PTFE stamp.
© 2013 Elsevier B.V. All rights reserved

Original language	English
Journal	Microelectronic Engineering
Volume	106
Pages (from-to)	1-8
ISSN	0167-9317
DOIs	https://doi.org/10.1016/j.mee.2013.01.049
Publication status	Published - 2013

Keywords

Flexible stamps
Nanoimprint lithography (NIL)
PTFE constitutive model
Frictional behavior
Strain field measurements
FEM modeling

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10.1016/j.mee.2013.01.049

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title = "Modeling the constitutive and frictional behavior of PTFE flexible stamps for nanoimprint lithography",

abstract = "In the present work, the deformation on micro-scale of PTFE flexible stamps for nanoimprint lithography is modeled. This is achieved via a combination of proper models for the constitutive behavior as well as the frictional conditions between the deforming PTFE stamp and the steel tool. The model was verified through an experiment, where a PTFE sheet was deformed by a steel sphere mounted in a tensile test machine. Good agreement between simulations and experimental results is found, both regarding force–displacement and corresponding principal strain measurements. As expected, applying the correctfrictional behavior between PTFE and steel on micro-scale is shown to be of major importance in order to accurately simulate the strain field in the deformed PTFE stamp.{\textcopyright} 2013 Elsevier B.V. All rights reserved",

keywords = "Flexible stamps, Nanoimprint lithography (NIL), PTFE constitutive model, Frictional behavior, Strain field measurements, FEM modeling",

author = "Sonne, {Mads Rostgaard} and Hattel, {Jesper Henri}",

year = "2013",

doi = "10.1016/j.mee.2013.01.049",

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T1 - Modeling the constitutive and frictional behavior of PTFE flexible stamps for nanoimprint lithography

AU - Sonne, Mads Rostgaard

AU - Hattel, Jesper Henri

PY - 2013

Y1 - 2013

N2 - In the present work, the deformation on micro-scale of PTFE flexible stamps for nanoimprint lithography is modeled. This is achieved via a combination of proper models for the constitutive behavior as well as the frictional conditions between the deforming PTFE stamp and the steel tool. The model was verified through an experiment, where a PTFE sheet was deformed by a steel sphere mounted in a tensile test machine. Good agreement between simulations and experimental results is found, both regarding force–displacement and corresponding principal strain measurements. As expected, applying the correctfrictional behavior between PTFE and steel on micro-scale is shown to be of major importance in order to accurately simulate the strain field in the deformed PTFE stamp.© 2013 Elsevier B.V. All rights reserved

AB - In the present work, the deformation on micro-scale of PTFE flexible stamps for nanoimprint lithography is modeled. This is achieved via a combination of proper models for the constitutive behavior as well as the frictional conditions between the deforming PTFE stamp and the steel tool. The model was verified through an experiment, where a PTFE sheet was deformed by a steel sphere mounted in a tensile test machine. Good agreement between simulations and experimental results is found, both regarding force–displacement and corresponding principal strain measurements. As expected, applying the correctfrictional behavior between PTFE and steel on micro-scale is shown to be of major importance in order to accurately simulate the strain field in the deformed PTFE stamp.© 2013 Elsevier B.V. All rights reserved

KW - Flexible stamps

KW - Nanoimprint lithography (NIL)

KW - PTFE constitutive model

KW - Frictional behavior

KW - Strain field measurements

KW - FEM modeling

U2 - 10.1016/j.mee.2013.01.049

DO - 10.1016/j.mee.2013.01.049

M3 - Journal article

SN - 0167-9317

VL - 106

SP - 1

EP - 8

JO - Microelectronic Engineering

JF - Microelectronic Engineering

ER -

Modeling the constitutive and frictional behavior of PTFE flexible stamps for nanoimprint lithography

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