Modeling of CMUTs with Multiple Anisotropic Layers and Residual Stress

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    Usually the analytical approach for modeling CMUTs uses the single layer plate equation to obtain the deflection and does not take anisotropy and residual stress into account. A highly accurate model is developed for analytical characterization of CMUTs taking an arbitrary number of layers and residual stress into account. Based on the stress-strain relation of each layer and balancing stress resultants and bending moments, a general multilayered anisotropic plate equation is developed for plates with an arbitrary number of layers. The exact deflection profile is calculated for a circular clamped plate of anisotropic materials with residual bi-axial stress. From the deflection shape the critical stress for buckling is calculated and by using the Rayleigh-Ritz method the natural frequency is estimated.
    Original languageEnglish
    Title of host publicationProceedings of IEEE International Ultrasonics Symposium (IUS), 2014
    Publication date2014
    Pages2603 - 2606
    Publication statusPublished - 2014
    Event2014 IEEE International Ultrasonics Symposium (IUS) - Hilton Hotel, Chicago, IL, United States
    Duration: 3 Sep 20146 Sep 2014


    Conference2014 IEEE International Ultrasonics Symposium (IUS)
    LocationHilton Hotel
    CountryUnited States
    CityChicago, IL

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