Usually the analytical approach for modeling CMUTs uses the single layer plate equation to obtain the deflection and does not take anisotropy and residual stress into account. A highly accurate model is developed for analytical characterization of CMUTs taking an arbitrary number of layers and residual stress into account. Based on the stress-strain relation of each layer and balancing stress resultants and bending moments, a general multilayered anisotropic plate equation is developed for plates with an arbitrary number of layers. The exact deflection profile is calculated for a circular clamped plate of anisotropic materials with residual bi-axial stress. From the deflection shape the critical stress for buckling is calculated and by using the Rayleigh-Ritz method the natural frequency is estimated.
|Title of host publication||Proceedings of IEEE International Ultrasonics Symposium (IUS), 2014|
|Pages||2603 - 2606|
|Publication status||Published - 2014|
|Event||2014 IEEE International Ultrasonics Symposium (IUS) - Hilton Hotel, Chicago, IL, United States|
Duration: 3 Sep 2014 → 6 Sep 2014
|Conference||2014 IEEE International Ultrasonics Symposium (IUS)|
|Period||03/09/2014 → 06/09/2014|