Modeling and Measurements of CMUTs with Square Anisotropic Plates

Mette Funding la Cour, Thomas Lehrmann Christiansen, Christian Dahl-Petersen, Kasper Reck, Ole Hansen, Jørgen Arendt Jensen, Erik Vilain Thomsen

Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

535 Downloads (Pure)

Abstract

The conventional method of modeling CMUTs use the isotropic plate equation to calculate the deflection, leading to deviations from FEM simulations including anisotropic effects of around 10% in center deflection. In this paper, the deflection is found for square plates using the full anisotropic plate equation and the Galerkin method. Utilizing the symmetry of the silicon crystal, a compact and accurate expression for the deflection can be obtained. The deviation from FEM in center deflection is <0.1%. The deflection was measured on fabricated CMUTs using a white light interferometer. Fitting the anisotropic calculated deflection to the measurement a deviation of 0.5-1.5% is seen for the fitted values. Finally it was also measured how the device behaved under increasing bias voltage and it is observed that the model including anisotropic effects is within the uncertainty interval of the measurements.
Original languageEnglish
Title of host publicationProceedings of the 2013 IEEE International Ultrasonics Symposium
PublisherIEEE
Publication date2013
Pages2187-2190
ISBN (Print)9781467356862
DOIs
Publication statusPublished - 2013
Event2013 IEEE International Ultrasonics Symposium - Prague Convention Center , Prague, Czech Republic
Duration: 21 Jul 201325 Jul 2013
http://ewh.ieee.org/conf/uffc/2013/

Conference

Conference2013 IEEE International Ultrasonics Symposium
LocationPrague Convention Center
CountryCzech Republic
CityPrague
Period21/07/201325/07/2013
Internet address

Keywords

  • Fields, Waves and Electromagnetics
  • Anisotropic magnetoresistance
  • Equations
  • Finite element analyses
  • Mathematical model
  • Silicon
  • Voltage measurement
  • Substrates

Cite this

la Cour, M. F., Christiansen, T. L., Dahl-Petersen, C., Reck, K., Hansen, O., Jensen, J. A., & Thomsen, E. V. (2013). Modeling and Measurements of CMUTs with Square Anisotropic Plates. In Proceedings of the 2013 IEEE International Ultrasonics Symposium (pp. 2187-2190). IEEE. https://doi.org/10.1109/ULTSYM.2013.0559