Mobility and Carrier Concentration Measurements on nm-Wide Semiconductor Fins

M.-L. Witthøft; S. Folkersma; J. Bogdanowicz; T. Marangoni; D. Mackenzie; A.  Vohra; C. Porret; R. Loo; H. H.  Henrichsen; O. Hansen; W. Vandervorst; D.H. Petersen

Mobility and Carrier Concentration Measurements on nm-Wide Semiconductor Fins

M.-L. Witthøft
, S. Folkersma
, J. Bogdanowicz
, T. Marangoni
, D. Mackenzie
, A. Vohra
, C. Porret
, R. Loo
, H. H. Henrichsen
, O. Hansen
, W. Vandervorst
, D.H. Petersen

Research output: Contribution to conference › Conference abstract for conference › Research › peer-review

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Original language	English
Publication date	2018
Publication status	Published - 2018
Event	2018 E-MRS Spring Meeting and Exhibit - Convention Centre of Strasbourg , Strasbourg , France Duration: 18 Jun 2018 → 22 Jul 2018

Conference

Conference	2018 E-MRS Spring Meeting and Exhibit
Location	Convention Centre of Strasbourg
Country/Territory	France
City	Strasbourg
Period	18/06/2018 → 22/07/2018

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ERMS spring 2018 v2Accepted author manuscript, 14 KB

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Cite this

@conference{cf50093dccdb42249268f804b8b1b600,

title = "Mobility and Carrier Concentration Measurements on nm-Wide Semiconductor Fins",

author = "M.-L. Witth{\o}ft and S. Folkersma and J. Bogdanowicz and T. Marangoni and D. Mackenzie and A. Vohra and C. Porret and R. Loo and Henrichsen, \{H. H.\} and O. Hansen and W. Vandervorst and D.H. Petersen",

year = "2018",

language = "English",

note = "2018 E-MRS Spring Meeting and Exhibit ; Conference date: 18-06-2018 Through 22-07-2018",

}

TY - ABST

T1 - Mobility and Carrier Concentration Measurements on nm-Wide Semiconductor Fins

AU - Witthøft, M.-L.

AU - Folkersma, S.

AU - Bogdanowicz, J.

AU - Marangoni, T.

AU - Mackenzie, D.

AU - Vohra, A.

AU - Porret, C.

AU - Loo, R.

AU - Henrichsen, H. H.

AU - Hansen, O.

AU - Vandervorst, W.

AU - Petersen, D.H.

PY - 2018

Y1 - 2018

M3 - Conference abstract for conference

T2 - 2018 E-MRS Spring Meeting and Exhibit

Y2 - 18 June 2018 through 22 July 2018

ER -