MM96.03 Investigation on the Surface Topography in Polishing using Atomic Force Microscopy

    Research output: Contribution to journalJournal articleResearchpeer-review

    Original languageEnglish
    JournalC I R P Annals
    Volume45
    Issue number1
    Pages (from-to)523-528
    ISSN0007-8506
    Publication statusPublished - 1996

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