MM96.03 Investigation on the Surface Topography in Polishing using Atomic Force Microscopy

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@article{8f54b4b9999d4aa589bd74922203465e,

title = "MM96.03 Investigation on the Surface Topography in Polishing using Atomic Force Microscopy",

author = "Chiffre, {Leonardo De} and Hansen, {Hans N{\o}rgaard} and A Bronstein",

year = "1996",

language = "English",

volume = "45",

pages = "523--528",

journal = "C I R P Annals",

issn = "0007-8506",

publisher = "Elsevier",

number = "1",

}