Minimum scale controlled topology optimization and experimental test of a micro thermal actuator

S. Heo, Gil Ho Yoon, Y.Y. Kim

Research output: Contribution to journalJournal articleResearchpeer-review

Abstract

This paper is concerned with the optimal topology design, fabrication and test of a micro thermal actuator. Because the minimum scale was controlled during the design optimization process, the production yield rate of the actuator was improved considerably; alternatively, the optimization design without scale control resulted in a very low yield rate. Using the minimum scale controlling topology design method developed earlier by the authors, micro thermal actuators were designed and fabricated through a MEMS process. Moreover, both their performance and production yield were experimentally tested. The test showed that control over the minimum length scale in the design process greatly improves the yield rate and reduces the performance deviation.
Original languageEnglish
JournalSensors and Actuators A: Physical
Volume141
Issue number2
Pages (from-to)603-609
ISSN0924-4247
DOIs
Publication statusPublished - 2008

Keywords

  • minimum scale control
  • topology optimization
  • micro thermal actuator
  • design

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