Microsystem with integrated capillary leak to mass spectrometer for high sensitivity temperature programmed desorption

Ulrich Quaade, Søren Jensen, Ole Hansen

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Abstract

Temperature programmed desorption (TPD) is a method for obtaining information about quantities and binding properties of adsorbed species on a surface. A microfabricated flow system for TPD with an integrated capillary leak to a mass spectrometer is presented. The use of an integrated capillary leak minimizes dead volumes in the system, resulting in increased sensitivity and reduced response time. These properties make the system ideal for TPD experiments in a carrier gas. With CO desorbing from platinum as model system, it is shown that CO desorbing in 105 Pa of argon from as little as 0.5 cm2 of platinum foil gives a clear desorption peak. By using the microfabricated flow system, TPD experiments can be performed in a carrier gas with a sensitivity approaching that of TPD experiments in vacuum. ©2004 American Institute of Physics
Original languageEnglish
JournalReview of Scientific Instruments
Volume75
Issue number10
Pages (from-to)3345-3347
ISSN0034-6748
DOIs
Publication statusPublished - 2004

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Copyright (2004) American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics.

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