Microstructure modification during the growth of TiN hard coatings

Karen Pantleon, Peggy John, Hagen Sahm, Heinrich Oettel

    Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

    Original languageEnglish
    Title of host publicationLe Vide - science, technique et applications No. 279
    Publication date1996
    Pages54-56
    Publication statusPublished - 1996

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