Microstructure modification during the growth of TiN hard coatings

Karen Pantleon, Peggy John, Hagen Sahm, Heinrich Oettel

    Research output: Chapter in Book/Report/Conference proceedingArticle in proceedingsResearchpeer-review

    Original languageEnglish
    Title of host publicationLe Vide - science, technique et applications No. 279
    Publication date1996
    Pages54-56
    Publication statusPublished - 1996
    Event5th Symposium on trends and new applicaions in thin films - Colmar, France
    Duration: 1 Jan 1996 → …

    Conference

    Conference5th Symposium on trends and new applicaions in thin films
    CityColmar, France
    Period01/01/1996 → …

    Cite this

    Pantleon, K., John, P., Sahm, H., & Oettel, H. (1996). Microstructure modification during the growth of TiN hard coatings. In Le Vide - science, technique et applications No. 279 (pp. 54-56)