Microstructure Fabrication with a CO_2 Laser System

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Original language	English
Journal	Journal of Micromechanics and Microengineering
Volume	14
Issue number	2
Pages (from-to)	182-189
ISSN	0960-1317
DOIs	https://doi.org/10.1088/0960-1317/14/2/003
Publication status	Published - 2004

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@article{e752d8471a95477cb168ac8ced04a99c,

title = "Microstructure Fabrication with a CO\_2 Laser System",

author = "Detlef Snakenborg and Henning Klank and Kutter, \{J{\"o}rg Peter\}",

year = "2004",

doi = "10.1088/0960-1317/14/2/003",

language = "English",

volume = "14",

pages = "182--189",

journal = "Journal of Micromechanics and Microengineering",

issn = "0960-1317",

publisher = "IOP Publishing",

number = "2",

}

TY - JOUR

T1 - Microstructure Fabrication with a CO_2 Laser System

AU - Snakenborg, Detlef

AU - Klank, Henning

AU - Kutter, Jörg Peter

PY - 2004

Y1 - 2004

U2 - 10.1088/0960-1317/14/2/003

DO - 10.1088/0960-1317/14/2/003

M3 - Journal article

SN - 0960-1317

VL - 14

SP - 182

EP - 189

JO - Journal of Micromechanics and Microengineering

JF - Journal of Micromechanics and Microengineering

IS - 2

ER -