Microstructure fabrication with a CO2 laser system: characterization and fabrication of cavities produced by raster scanning of the laser beam

Martin Frøhling Jensen, Mikkel Nørholm, L.H. Christensen, Oliver Geschke

    Research output: Contribution to journalJournal articleResearchpeer-review

    Original languageEnglish
    JournalLab on a Chip
    Volume3
    Issue number4
    Pages (from-to)302-307
    ISSN1473-0197
    Publication statusPublished - 2003

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