Microstructure Fabrication with a CO_2 Laser System

Detlef Snakenborg, Henning Klank, Jörg Peter Kutter

Research output: Contribution to journal › Journal article › Research › peer-review

Original language	English
Journal	Journal of Micromechanics and Microengineering
Volume	14
Issue number	2
Pages (from-to)	182-189
ISSN	0960-1317
DOIs	https://doi.org/10.1088/0960-1317/14/2/003
Publication status	Published - 2004

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title = "Microstructure Fabrication with a CO_2 Laser System",

author = "Detlef Snakenborg and Henning Klank and Kutter, {J{\"o}rg Peter}",

year = "2004",

doi = "10.1088/0960-1317/14/2/003",

language = "English",

volume = "14",

pages = "182--189",

journal = "Journal of Micromechanics and Microengineering",

issn = "0960-1317",

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}

TY - JOUR

T1 - Microstructure Fabrication with a CO_2 Laser System

AU - Snakenborg, Detlef

AU - Klank, Henning

AU - Kutter, Jörg Peter

PY - 2004

Y1 - 2004

U2 - 10.1088/0960-1317/14/2/003

DO - 10.1088/0960-1317/14/2/003

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SN - 0960-1317

VL - 14

SP - 182

EP - 189

JO - Journal of Micromechanics and Microengineering

JF - Journal of Micromechanics and Microengineering

IS - 2

ER -